Multi-stage Roots Pumps - A 100 L / A 100 L ES
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Multi-stage Roots Pumps - A 100 L / A 100 L ES - 1

A 100 L / A 100 L ES Integrated light duty dry pump for fast pump down. The perfect solution for load-lock and transfer chambers

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Multi-stage Roots Pumps - A 100 L / A 100 L ES - 2

Integrated light duty dry pump for fast pump down. The perfect solution for load-lock and transfer chambers. Since 1999, date of A 100 L introduction, the dry pump integration concept has become a standard in the Semiconductor industry. In order to benefit of A 100 L proven design and its recognized reliability and to answer to sustanibility concern, an innovative Energy Saving (ES) option has been developped by Pfeiffer Vacuum. ES option can reduce power consumption by 50  %, providing significant cost of ownership reduction with no impact to throughput and footprint. In addition, the...

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Multi-stage Roots Pumps - A 100 L / A 100 L ES - 3

Main power Inlet CDA or N2 flange Inlet water flange Outlet water flange Technical data Pump model Pumping speed Typical ultimate pressure Power supply voltage, 3 phases, 50-60 Hz Power consumption – at ultimate pressure Max. noise level at full speed Max. volume size Cycling period, max. on 25 liters volume Continuous inlet flow, max. Typical vibration speed (at inlet flange 10  1,000 Hz) –  Cooling water connection Cooling water flow, min. Compressed dry air (CDA) connection Compressed dry air (CDA) pressure supply, min. Compressed dry air (CDA) flow1 Weight Flange (in) Flange (out) Tool...

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Multi-stage Roots Pumps - A 100 L / A 100 L ES - 4

VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a perfect vacuum solution? Please contact...

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