HPA/SPM - Qualitative and quantitative gas analysis - 10 Pages

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HPA/SPM - Qualitative and quantitative gas analysis

Catalog excerpts

HPA/SPM Modular and flexible solutions for qualitative and quantitative gas analysis

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Modular and flexible solutions for qualitative and quantitative gas analysis High Pressure Analyzer HPA 220 With the HPA 220 high pressure analyzer, we offer a flexible, modular vacuum solution that is ideal not just for analyzing gases but also for monitoring and controlling processes. The perfectly matched combination of a mass spectrometer system and a dry HiPace turbopumping station is supplied with three different gas inlet options. This allows you to work in a pressure range of up to 50 hPa. The choice is yours! Whether you are looking for a manual or electropneumatic gas inlet, with...

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Gas analysis in the pressure range of up to 50 hPa Mass spectrometer PrismaPlus 1 – 100 amu 1 – 200 amu 1 – 300 amu Gas inlet system 1,2) Valve interface HPI 040 3,4) Double gate valve 5) Gas dosing valve UDV 040 Vakuumd Elektrisch Prozesskammer Vacuum gauge ActiveLine PKR 361 for monitoring the pressure and for protecting the filaments 1,2) Valve interface HPI 040 Manually or electropneumatically operated. Consists of three valves, a bellows-sealed gate valve with a nominal diameter of DN 40 CF for residual gas analysis or leak detection up to < 5 · 10-7 hPa and two valves with...

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Double gate valve, manual Doppelzugschieber, pneumatisch Order number Open ion source, filament: yttriated iridium Open ion source, filament: tungsten HPI 040 H, bellows-sealed gate valve, DN 40 CF, manually operated, two bypass valves with 0.1 mm and 0.3 mm orifices, 0.03 mm third orifice enclosed HPI 040 P, bellows-sealed gate valve, DN 40 CF, electropneumatically operated, two bypass valves with 0.1 mm and 0.3 mm orifices, 0.03 mm third orifice enclosed Double gate valve, DN 40 CF, manually operated, one gate opens to release full cross-section, one gate with 0.1 mm orifice Double gate...

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Software support Both the SPM 220 and the HPA 220 are supplied with user- specific operating software which can be operated intuitively. The Quadera® based software package is used to operate the devices. This package contains analysis routines for the process gases Ar, Ar+INb, Ar+N2+02 and for residual gas User-specific Guadera® software Available Devices High Speed Measurement Medium Speed Measurement Auxilary Routines Helium Leaktest Offset Determination Available Devices Argon, Nitrogen and Oxygen Nitr zzer Scan Analog Mass Scale Adjust Example of an SPM user interface

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Total Pressure: 2.91E-07 mbar Hide Control Panel Control unit for the gas inlet system Multiplex operation SPM 220 and HPA 220 can be integrated in a complex system through an Ethernet connection. This enables simultaneous data evaluation of several mass spectrometer systems through a single central PC.

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Sputtering process gas analysis in the pressure range of up to 10 hPa Mass spectrometer PrismaPlus 1 – 100 amu 1 – 200 amu Vacuum gauge ActiveLine PKR 361 for monitoring the pressure and for protecting the filaments Gas inlet system Safety valve SVV 040 Orifice flange (differentially pumped) Valve control unit VCU 220 for electropneumatic safety valve SVV 040 Turbopump HiPace 80 with TC 110 RS 4 accessory ports + backingpump MVP 020-3 (not shown) SPM ion source for instantaneous process monitoring Excellent detection limits for H2, O2, H2O and CO2 Minimized background influence on the...

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without addition with SVV 040 safety valve with a flange with orifice Order number SPM ion source, filament: yttriated iridium SPM ion source, filament: tungsten Safety valve SVV 040 PM, electropneumatically operated Differentially pumped DN 40 CF flange with orifice for a pressure range of up to 10 hPa Cable length and accessory option 3 m, with TPG display and control unit 3 m, with DCU display and control unit 3 m, with TPG and DCU display and control units 10 m, with TPG display and control unit 10 m, with DCU display and control unit 10 m, with TPG and DCU display and control units...

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VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 All data subject to change without prior notice. PK 0114 PEN (September 2016/10) Benefit from...

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