A 200 L - Multi-stage Roots Pumps - 6 Pages

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A 200 L - Multi-stage Roots Pumps

Catalog excerpts

A 200 L Multi-stage Roots pump for light duty processes with the highest throughput in the integrated pump market

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Multi-stage Roots pump for light duty processes with the highest throughput in the integrated pump market The new A 200 L guarantees highest throughput for load lock applications thanks to a 200 m3/h peak pumping speed, a low base pressure and its suitability for heavy duty cycles. As an illustration: The A 200 L is compatible with a cycle rate of up to 300 pump downs per hour on a 20 liters load lock chamber, which is over three times the maximum cycle rate of the 100 m3/h class A 100 L. The A 200 L is also suitable for other light duty applications from the use in transfer chambers over...

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Multi-stage Roots pump for light duty processes with the highest throughput in the integrated pump market Pumping speed Pump down curves on 20 liters Pressure [hPa] Pressure (hPa) Pumping speed speed (m/h] [m3 /h) Pumping Pump down curves on 20 liters 1000

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Technical data A 200 L Rotational speed Peak pumping speed Typical pump down time to 300 mTorr, 20 liters chamber Typical ultimate pressure Power supply voltage Power consumption Max. cycling frequency (20 l volume) Max. continuous inlet flow Max noise level at full speed Typical vibration level at inlet flange 10 – 1,000 Hz Cooling water Cooling water connection Ambient temperature Inlet/exhaust size Tool interface Variable speed Interchangeable & backward compatible with A 100 L Ultimate pressure Cycle dependent Horizontal inlet only Order numbers A 200 L Tool interface Order number...

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The A 200 L is 100 % interchangeable with the 100 m3/h class A 100 L. Thanks to the same dimensions as well as to the identical electrical and water cooling connections, the A 200 L can easily replace the A 100 L if higher performance is needed. There is no need to invest in equipment modifications. Customer benefits Top performance and unrivaled throughput The lowest footprint of its class and dual inlet position allow for easy system integration Energy-efficient and cost-saving High cleanroom compatibility thanks to low noise and vibration levels Integrated self-monitoring system High...

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Vacuum solutions from a single source Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. Complete range of products From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. Competence in theory and practice Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Headquarters · Germany T +49 6441 802-0 info@pfeiffer-vacuum.de All data subject to change without prior notice. PM0006 PEN (July...

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