Turbopumps - The optimal solution for your high vacuum application
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Turbopumps The optimal solution for your high vacuum application

Turbopumps Design and operating principle of turbopumps Origin The idea of turbomolecular pumps goes back to the Pfeiffer Vacuum engineer Dr. Willi Becker, who invented the first turbomolecular pump in 1958. This is the ancestor of today’s turbopumps. Technology Turbopumps belong to the category of kinetic vacuum pumps, which means that gases are moved from the inlet to the exhaust by momentum transfer. The design is that of a turbine: a multi-stage rotor with rotating bladed disks. Stators with similar geometries are mirrored between the spinning rotor disks. Rotor: Superposistion with...

Pumping speed and compression ratio The two main characteristics that define a turbopump are its pumping speed and compression ratio. The pumping speed describes the ability of the pump to evacuate the volumetric flow, whether it is just the chamber volume or a constant gas flow. The compression ratio is the ability of the pump to work in conjunction with the roughing pump to keep molecules out of the vacuum chamber. Both of these characteristics depend on the gas type. Turbo drag pump nitrogen Classic turbopump nitrogen 10 8 10 7   Turbo drag pump hydrogen Classic turbopump hydrogen...

Turbopumps Bearing technologies Suspension Pfeiffer Vacuum is using two most reliable design features. The hybrid bearing suspesion consiting of a permanent magnet bearing at the high vacuum side of the turbine and a ceramic ballbearing at the exhaust of the pumps. The second concept uses a 5-axis actively controlled magnetic bearing design. Permanent magnetic bearing Safety bearing Rotor shaft Ceramic ball bearing Hybrid bearing suspension The hybrid bearing suspension was invented by Pfeiffer Vacuum more than 40 years ago. It consists of a permanent magnetic bearing and a ceramic ball...

Upper safety bearing Upper radial bearing Rotor shaft Lower radial bearing Upper axial bearing Lower safety bearing Lower axial bearing 5-axis active magnetically levitated suspension Turbopumps can also work with a 5-axis active magnetically levitated suspension. The rotor is levitated through digital electronic control and electromagnets. The 5-axis position of the turbo rotor is continuously monitored and readjusted in real time. The magnetic bearing allows the rotor to spin freely in its true axis of inertia, which can differ from the geometric center of the rotor. This counteracts the...

Turbopumps The optimal solution for your high vacuum application Drive electronics & controllers Drive electronics are mainly responsible for the safe operation of the high-speed motor drive rotation. In magnetically levitated pumps, the electronics package must also monitor and ensure the proper rotor position and control the active electromagnets. There are different controllers available which can either be mounted directly to the pump or installed as an external rack. Some controllers have internal power supplies so that they can be used with 90 – 240 V AC while smaller controllers can...

Pfeiffer Vacuum turbopump series and specifications: Pfeiffer Vacuum offers a comprehensive portfolio with all types of turbopumps. Our mature product line has many variations which enables us to provide our customers with the optimal product solution for their vacuum application. HiPace 10 – 800; HiPace Plus ■ Hybrid bearing turbopumps in the pumping speed class of 10 to 800 l/s ■ Best size to performance ratio ■ High compression for light gases (especially H series) ■ Compact yet robust design ■ High reliability ■ Different product versions providing optimal solutions for differnt process...

HiPace® 10 – 800 The optimal solution for your high vacuum application in the pumping speed class from 10 to 800 l/s High gas throughput and high pumping speed Your added value Highest reliability due to robust design and proven bearing system HiPace turbomolecular pumps are reliable, robust and suitable for many vacuum solutions. Their high compression ratio for light gases is ideal for high vacuum applications. A large selection of standard accessories and communications completes the HiPace portfolio. Pfeiffer Vacuum also offers application specific solutions with pumping speeds from 10...

Maximum availability due to on-site bearing change Maximum precision thanks to patented Laser Balancing technology Minimum space requirement due to compact design Flexible use due to arbitrary mounting orientation1) 1) Specific product versions for different applications: HiPace The standard HiPace turbopump has a compound rotor containing both turbine blades and a holweck drag stage. It provides a good combination of gas throughput and compression ratio. It is ideal for the most common vacuum applications. HiPace H The HiPace 300 H and HiPace 700 H turbomolecular pumps are the ultimate...

HiPace® 300 – 800 M Compact turbopumps with magnetic bearings in the pumping speed class from 300 to 800 l/s High gas throughput for all process gases Your added value Reliable due to excellent long-term stability The turbopumps of the HiPace M series are equipped with a 5-axis magnetically levitated suspension. They are designed for general high vacuum applications and therefore contain compound rotors. The completely oil-free magnetic suspension virtually eliminates the need for maintenance and any possibility for contamination. For vibration sensitive applications, the HiPace M has an...

Clean vacuum due to lubricant-free magnetic bearing Low vibration and low magnetic stray field Durable due to automatic unbalance compensation Easy installation Flexible use due to arbitrary mounting orientation Hybrid rotor Drive electronics TM 700 with interface panel 5 axis magnetig bearing Holweck stage Integrated water cooling Please find further details and technical data here

HiPace® 1200 – 2800 IT Compact turbopumps with hybrid bearings in the pumping speed from 1200 up to 2800 l/s High vacuum performance for light gases (H2, He) and heavy gases (Ar, CF4) Your added value Maximum reliability through the use of hybrid bearings The HiPace 1200 – 2800 turbopumps are reliable as well as robust, and therefore suitable for many vacuum applications. Due to the typical use of these pumps in harsh environments, the optimal rotor solution is a pure turbo rotor. Even without a drag stage, these pumps have a sufficient compression ratio for most general applications. A...