Vacuum solutions from a single source Our complete product portfolio at a glance Research & Development

Complete solutions Pfeiffer Vacuum offers extensive solutions from a single source. A strong partner with a complete product portfolio. From consulting in the initial offer phase to the servicing of installed systems, Pfeiffer Vacuum stands for top quality products and services. Unique to Pfeiffer Vacuum is the combination of extensive technical expertise, high value products, competent advice and customer friendly service. ■ W hether for vacuum generation, measurement, analysis, leak detection, complete systems or components: the Pfeiffer Vacuum product portfolio offers the perfect solution...

Vacuum measurement, total ~/=h Rotary/Linear feedthrough Electrical feedthrough Vacuum measurement, partial Vacuum measurement, total Example of a vacuum solution from Pfeiffer Vacuum's product portfolio with an overview from low vacuum to ultra-high vacuum

Product safety Safety for high demands

EC directives, depending on which of our products are used: Directive Application to 2006/42/EC Machinery and partly completed machinery 2014/35/EU Electrical devices of 50 to 1,000 V AC or 75 to 1,500 V DC 2014/30/EU Electromagnetic compatibility 2014/68/EU Pressure devices (overpressure >500 hPa) 2014/29/EU Simple pressure vessels 2014/34/EU Equipment and protective systems intended for use in potentially explosive atmospheres (ATEX) 2011/65/EU ROHS Restriction of the use of certain Hazardous Substances Our vacuum solutions range from the selection of individual components to complete vacuum...

Market overview Vacuum solutions for many applications and numerous markets

Industry ■ Medical and Pharma ■ Mobility ■ Energy ■ Process industry ■ Industrial vacuum ■ Thin film deposition Analytics ■ Biotechnology ■ Nanotechnology ■ Quality assurance ■ Surface analysis ■ Spectroscopy Semiconductor and Emerging Technologies ■ Ion implantation ■ Plasma etching ■ Deposition (PVD, CVD, ALD) ■ Lithography ■ Inspection Research & development, ■ Fusion reactors ■ Accelerators ■ Surface technology ■ Space simulation chambers ■ Superconductor applications ■ Nanotechnology

Single-stage and two-stage rotary vane pumps

HenaLine Advantages UnoLine Plus Advantages ■ Robust through minimal wear Pascal Advantages Two-stage rotary vane pumps DuoLine™ Advantages Pascal^ Advantages 11 Various versions available: ■ SD version for all vacuum applications with non-corrosive gases ■ I version with additional oil pump for the requirements of instrumental analytics ■ C1 version for applications with aggressive or corrosive gases ■ C2 version for harsh duty applications with the most aggressive pumping environment

Diaphragm pumps, screw pumps

l 11 ■ Particulary high pumping speed in DC version HeptaDry® screw pumps Advantages ■ Energy saving operation through optimal rotor geometry HiScroll scroll pumps Advantages

Multi-stage Roots pumps

Clean processes ACP 15 - 40 SD/G/GV/CP/SR 1 l 13 ■ Dry, air cooled pumping solution Harsh duty applications Advantages Benefits ■ Long maintenance intervals (up to four years) Advantages Benefits ■ High energy efficiency 11 Various versions available: ■ SD version designed for dust-free inert gases ■ G version designed for low quantities of corrosive gases ■ CV version compatible with condensable gases ■ CP version for gas recirculation ■ SR version with remote electronic and fluorine free 2) Various versions available: ■ XN version for extremely corrosive applications ■ X version for corrosive...

Roots pumps

■ Usable up to 200 Hz with frequency converter OktaLine® Advantages ■ No cooling water due to air cooling Explosion protection OktaLine® ATEX Advantages Benefits ■ Equipment category 2 and 3, T3 Highes pressure difference OktaLine® G ■ High differential pressures up to 900 hPa possible

PFEIFFER^ VACUUM Vacuum generation Roots pumping stations

Pumping station with OktaLine Roots pumpCombiLine WH Advantages ■ Various pump and accessory combinations possible ■ Various pump and accessory combinations possible CombiLine WD Advantages Benefits ■ Various pump and accessory combinations possible Pumping station with HiLobe Roots pump CombiLine RH Advantages Benefits ■ Various pump and accessory combinations possible CombiLine RU Advantages Benefits Advantages Benefits ■ Various pump and accessory combinations possible

Vacuum generation Turbopumps

With hybrid bearings Advantages Benefits ■ Compact design along with numerous mounting positions11 Advantages Benefits ■ Robustness against particle problems ■ Replaces several discrete turbopumps With magnetically levitated bearings HiPace® 300 - 800 M, ATH 500 M Advantages ■ Lower energy consumption through efficient magnetically levitating system ■ Magnetic levitation ■ Maintenance free operation, lower lifetime costs ■ Intelligent sensors and electronics ■ High operating safety ■ Freely selectable rotation speed ■ Optimized process adaptation in a broad RPM range ■ Any mounting orientation...

Turbo pumping stations

■ Pumping station ready for operation StandardHiCube® Classic Advantages ■ Pumping station ready for operation High performanceHiCube® Pro Advantages Benefits ■ Particularly fast pumpdown times due to the high pumping speed of the backing pump

Measurement equipment PFEIFFER^ VACUUM

Advantages Benefits ■ Standard serial interfaces AnalogActiveLine Advantages CenterLine Advantages Benefits ModularModulLine Advantages ■ Rugged and well-proven design Hand held gauges + Manometer TPG 201, 202 / Manometer Advantages

Analytical equipment

Residual gas analysis and gas analysis PrismaPro® Advantages ■ Compact complete system 1) Especially designed for coupling with thermobalences

Analytical equipment pfeiffer) vacuum

Gas analysis HPA Advantages Benefits ■ Numerous gas inlet options ■ Extremely high measurement speed thanks to modern electronics

Leak detection Tracer gas leak detectors (Helium/Hydrogen)

■ Small, light (21 kg), compact ■ Detection of large leaks up to 100 hPa High performance ASM 390 / 392 Advantages ■ High maneuverability and compact design Modular ASI 35 Advantages Benefits ■ Compact, robust, modular system ■ Sniffer for Helium and Hydrogen test gases