A 100 L / A 100 L ES Integrated light duty dry pump for fast pump down. The perfect solution for load-lock and transfer chambers

Integrated light duty dry pump for fast pump down. The perfect solution for load-lock and transfer chambers. Since 1999, date of A 100 L introduction, the dry pump integration concept has become a standard in the Semiconductor industry. In order to benefit of A 100 L proven design and its recognized reliability and to answer to sustanibility concern, an innovative Energy Saving (ES) option has been developped by Pfeiffer Vacuum. ES option can reduce power consumption by 50  %, providing significant cost of ownership reduction with no impact to throughput and footprint. In addition, the Energy...

Main power Inlet CDA or N2 flange Inlet water flange Outlet water flange Technical data Pump model Pumping speed Typical ultimate pressure Power supply voltage, 3 phases, 50-60 Hz Power consumption – at ultimate pressure Max. noise level at full speed Max. volume size Cycling period, max. on 25 liters volume Continuous inlet flow, max. Typical vibration speed (at inlet flange 10  1,000 Hz) –  Cooling water connection Cooling water flow, min. Compressed dry air (CDA) connection Compressed dry air (CDA) pressure supply, min. Compressed dry air (CDA) flow1 Weight Flange (in) Flange (out) Tool interface...

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