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Pfeiffer Vacuum+Fab Solutions
The ideal turbopumps for light gases - HiPace 350 / HiPace 450

The ideal turbopumps for light gases - HiPace 350 / HiPace 450

Product catalog summary

Overview: The HiPace® 350 and HiPace® 450 turbopumps are designed for optimal performance with light gases, offering compact, powerful, and reliable solutions for various applications in the vacuum industry.

Customer Benefits:

Compact and powerful design with pumping speeds up to 380 l/s.
Exceptional performance for light gases.
High reliability and cost-effectiveness.
Quiet operation and certified to Semi-S2, UL, CSA, and IP54/Nema12 standards.

Technical Specifications:

Pumping speeds: N2 (300-380 l/s), H2 (300-330 l/s), He (350-380 l/s), Ar (270-350 l/s).
Compression ratios: N2 (>1 · 10¹¹), H2 (2 · 10⁶), He (>1 · 10⁸), Ar (>1 · 10¹¹).
Operating voltage: 24 V DC and 48 V DC options.
Cooling: Standard convection with optional air/water cooling.
Interfaces: RS-485, Remote, ProfiNet, EtherCat.

Applications:

Analytics, vacuum process and semiconductor technology, coating, research & development, and industry.
Specific examples include mass spectrometry, electron microscopy, measurement technology, particle accelerators, and plasma physics.

Design and Maintenance:

Hybrid bearing design with ceramic ball bearing and magnetic radial bearings for robustness.
Maintenance-free operation for up to 5 years with on-site bearing maintenance and replacement.

Additional Features:

Multiple communication interfaces for process monitoring.
Flexible installation in any orientation.
Sound pressure level ≤50 dB(A).

Conclusion: The HiPace® 350 and 450 turbopumps provide a versatile and efficient solution for handling light gases in various industrial and research applications, backed by Pfeiffer Vacuum's comprehensive product and service offerings.

Catalog excerpts

The ideal turbopumps for light gases

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■ Analytics ■ Vacuum process and semiconductor technology ■ Coating ■ Research & development ■ Industry ■ Application examples: ■ Mass spectrometry ■ Electron microscopy ■ Measurement technology ■ Particle accelerators ■ Plasma physics PFEIFFER^" VACUUM

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The ideal turbopumps for light gases - HiPace 350 / HiPace 450-4

Technical data Technical data HiPace® 350 with TC 110 Connection flange Venting connection Pumping speed for Speed ±2% Gas throughput at full rotational speed for Fore-vacuum max. for Final pressure Weight Cooling type Cooling water Interfaces Protection category Admissible radial magnetic field max. Sound pressure level Mounting orientation Operating voltage Run-up time standard optional flow rate temperature radial axial DN 16 ISO-KF / G 3/8" G 1/8" 300 l/s 300 l/s 350 l/s 270 l/s 66,000 min-1 2 mbar l/s 11 mbar l/s 7 mbar l/s 0.7 mbar l/s > 1 ■ 1011 2 ■ 106 > 1 ■ 108 > 1 ■ 1011 10 mbar 6 mbar...

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The ideal turbopumps for light gases - HiPace 350 / HiPace 450-5

7 kg DN 16 ISO-KF / G 3/8" G 1/8" 380 l/s 330 l/s 380 l/s 350 l/s 66,000 min-1 2 mbar l/s 11 mbar l/s 7 mbar l/s 0.7 mbar l/s > 1 ■ 1011 2 ■ 106 > 1 ■ 108 > 1 ■ 1011 10 mbar 6 mbar 10 mbar 10 mbar < 1 ■ 10-7 hPa 7 kg 7.6 kg 7.6 kg 11.5 kg convection Air/water 100 l/h 15 - 25 °C RS-485, Remote IP54 PFEIFFER^" VACUUM

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The ideal turbopumps for light gases - HiPace 350 / HiPace 450-6

Dimensional drawings, pumping speeds, order number matrix Dimensions HiPace 350, DN 100 ISO-K Pumping speeds HiPace 350, DN 100

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The ideal turbopumps for light gases - HiPace 350 / HiPace 450-7

Order number matrix for HiPace 350/450 Order number Flange type Electronic drive unit Interface/accessory ports RS-485 ProfiBus DeviceNet E74 EtherCat ProfiNet Pfeiffer] vacuum

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The ideal turbopumps for light gases - HiPace 350 / HiPace 450-8

VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a perfect vacuum solution? Please contact us:...

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