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Pfeiffer Vacuum+Fab Solutions
Group: Busch Group
Catalog excerpts
The turbopump for ion implantation systems
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The turbopump for ion implantation systems With the HiPace 2800 IT Pfeiffer Vacuum presents a turbopump especially dedicated for ion implantation systems. The sophisticated rotor design of the turbopump results in an optimized pumping speed for light gases. This ensures the best process adaption for ion implantation processes, were hydrogen pumping speed is very important. With 2,600 l/s pumping speed for hydrogen the new HiPace 2800 IT is the best turbopump in its class. Harsh processes resistant The intelligent temperature management system reduces process condensation and deposition...
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Pumping speed Technical data Venting connection Run-up time Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Ultimate pressure according to PNEUROP Cooling method Cooling water consumption Cooling water temperature Max. permissible magnetic field Sound pressure level Order numbers
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VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Germany T +49 6441 802-0 All data subject to change without prior notice. PT 0195 PEN (December 2020/PoD) Benefit from our know-how and...
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Archived catalogs
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AMI 10008 Pages