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HiPace 2800 IT - The turbopump for ion implantation systems

HiPace 2800 IT - The turbopump for ion implantation systems

Product catalog summary

Overview: The HiPace® 2800 IT is a turbopump specifically designed for ion implantation systems, offering high pumping speeds for light gases and robust performance in harsh environments.

Customer Benefits:

Highest pumping speed for light gases, ideal for ion implantation.
Nickel-coated rotor for durability in harsh processes.
Intelligent temperature management to reduce condensation.
Rugged electronics and reliable hybrid bearing design for low ownership costs.

Technical Specifications:

Pumping speed: 2,600 l/s for H2, 2,300 l/s for N2, 2,100 l/s for Ar, 2,900 l/s for He.
Rotation speed: 27,300 rpm with a run-up time of 8.6 minutes.
Compression ratios: > 1 · 108 for N2 and Ar, 6 · 104 for He, 4 · 103 for H2.
Cooling method: Water, with a consumption of 100 l/h at 15–25°C.
Weight: 62 kg.
Sound pressure level: < 50 dB(A).

Design and Performance: The pump features a hybrid bearing design combining ceramic ball bearings and permanent magnetic bearings, ensuring a long life cycle and high reliability. The intelligent temperature management system allows for individual temperature settings to optimize process adaptation.

Applications: The HiPace 2800 IT is particularly suited for ion implantation processes where hydrogen pumping speed is critical.

Contact Information: Pfeiffer Vacuum GmbH, Germany. For more information, visit www.pfeiffer-vacuum.com.

Catalog excerpts

The turbopump for ion implantation systems

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The turbopump for ion implantation systems With the HiPace 2800 IT Pfeiffer Vacuum presents a turbopump especially dedicated for ion implantation systems. The sophisticated rotor design of the turbopump results in an optimized pumping speed for light gases. This ensures the best process adaption for ion implantation processes, were hydrogen pumping speed is very important. With 2,600 l/s pumping speed for hydrogen the new HiPace 2800 IT is the best turbopump in its class. Harsh processes resistant The intelligent temperature management system reduces process condensation and deposition inside...

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HiPace 2800 IT - The turbopump for ion implantation systems-3

Pumping speed Technical data Venting connection Run-up time Gas throughput at full rotational speed for N2 Gas throughput at full rotational speed for Ar Gas throughput at full rotational speed for H2 Gas throughput at full rotational speed for He Ultimate pressure according to PNEUROP Cooling method Cooling water consumption Cooling water temperature Max. permissible magnetic field Sound pressure level Order numbers

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HiPace 2800 IT - The turbopump for ion implantation systems-4

VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Germany T +49 6441 802-0 All data subject to change without prior notice. PT 0195 PEN (December 2020/PoD) Benefit from our know-how and our...

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