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Compact mass spectrometer - PrismaPro

Compact mass spectrometer - PrismaPro
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Compact mass spectrometer - PrismaPro

Product catalog summary
Overview
The PrismaPro® is the latest generation of compact mass spectrometers, designed with a modular structure and equipped with powerful software. It offers high sensitivity, maximum stability, and intelligent operation, making it suitable for various industrial and analytical applications, including semiconductor production and coating technology.

Key Features
  • Modular design for versatile application options.
  • High performance in a compact size.
  • Multiple interfaces for easy system integration, including Ethernet connectivity.
  • High measurement speed, stability, and resolution.
  • Flexible operation with interchangeable analyzers and electronics.
  • Low detection limit of 3 · 10-15 hPa (mbar).
  • Intuitive operation with PV MassSpec software.
  • Global support and on-site service.

Software and Interface
The PV MassSpec software is user-friendly, allowing for easy data capture and visualization. It supports automated measurement routines, leak detection, vacuum diagnosis, and automatic calibration. The PrismaPro also offers a JSON programming interface for direct access and integration into existing systems.

Technological Innovations
  • Biased ionization chamber for low background signals.
  • Field-axis technology for high ion transmission sensitivity without pre and post filters.

Technical Specifications
  • Mass range options: 1–100 u, 1–200 u, 1–300 u.
  • Detector types: Faraday and C-SEM/Faraday.
  • Operating temperature: Analyzer up to 200 °C, electronics 5 – 50 °C.
  • Connection flange: DN 40 CF-F.
  • Supply voltage: 100–240 V AC, 50/60 Hz.

Accessories and Connectivity
The PrismaPro offers various accessories for enhanced functionality, including connection cables, test boxes, and interface modules. It supports both standard and extended I/O connections for comprehensive control and data interchange.

Conclusion
Pfeiffer Vacuum's PrismaPro® mass spectrometer is a versatile and high-performance solution for a wide range of applications, supported by robust software and global service.
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Catalog excerpts

Compact mass spectrometer - PrismaPro-1

The latest generation of compact mass spectrometers. Modular design. Powerful software. Low detection limit.

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Compact mass spectrometer - PrismaPro-2

The latest generation of compact mass spectrometers. The combination of high sensiivity, maximum stability t and intelligent operation make the PrismaPro the perfect solution for mass spectrometry. Versatility Its modular design offers you a variety of application options in industrial and analytical environments, in research & development, in semiconductor production and in coating technology. The PrismaPro is the ideal solution for applications ranging from quality assurance, leak detection and residual gas analysis right through to complex, quantitative tasks. The newly developed PV MassSpec...

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Compact mass spectrometer - PrismaPro-3

Customer values Optimum adaptability due to modular design High performance in spite of compact size A variety of interfaces make for simple systems integration Networkable through Ethernet High measurement speed, stability and high resolution Flexible operation thanks to interchangeable analyzers and electronics Two filaments mean maximum up-time Lowest detectable partial pressure 3  · 10-15 hPa (mbar) Easy total pressure measurement due to directly connectable gauges Saving of time through intuitive operation of the PV MassSpec software World-class support and worldwide on-site service Easy...

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Compact mass spectrometer - PrismaPro-4

PV MassSpec – new Software for PrismaPro® The PV MassSpec software has been specifically developed for the PrismaPro and offers an easy-to-read, user-friendly platform for capturing and visualizing measured data and parameter records. Complete measurement procedures can be programmed. PV MassSpec measurement routine User-friendly, intuitive operation Automated measurement routines via included sequencer Leak detection and vacuum diagnosis with just one click Automatic calibration and tuning Simple definition of measurement recipes Mass spectrometer data can be linked with ext

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Compact mass spectrometer - PrismaPro-5

Biased ionization chamber Biasing the ionization chamber results in an extremely low background signal. The electron-emitting filament is positively biased relative to ground. This design prevents desorption of gas particles from the chamber walls, and thus the generation of an undesired background signals by electron stimulated desorption. Field-axis technology One of the most important factors in the performance of a mass spectrometer is the transmission of the ions from the ion source into the mass filter. With the aid of field-axis technology, the ions are able to cross the peripheral fields...

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Compact mass spectrometer - PrismaPro-6

QMG 250 F 0° (Faraday) open ion source QMG 250 F 90° (Faraday) open ion source Make sure that the flange or tube has an inner diameter of ≥ 37 mm, better ≥ 3

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Compact mass spectrometer - PrismaPro-7

QMG 250 M 0° (C-SEM/Faraday) open ion source QMG 250 M 90° (C-SEM/Faraday) open ion source

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Compact mass spectrometer - PrismaPro-8

Connection options Standard I/O connection (D-Sub 15-pin connector): 1 Analog input 2 Digital inputs 1 Relay Ethernet Power supply: External power supply SP 250 100 – 240 V AC; 50/60 Hz Extended I/O connection (D-Sub 62-pin connector): 8 Analog outputs 8 Analog inputs 10 Digital outputs 5 Digital inputs Connections total pressure transmitter ActiveLine or DigiLine with Analog Relay option (AR) e.g. to protect the mass spectrometer against an accidental increase of pressure Analog outputs Analog inputs Digital outputs Application examples • Measured values, e.g. ion currents • Data transfer to...

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Compact mass spectrometer - PrismaPro-9

Technichal data and accessories Technical data PrismaPro Mass range Max. operating pressure, C-SEM operation – Contribution to adjacent mass (40/41) Max. operating pressure, Faraday operation 1) Operating temperature, analyzer 200 °C (max. 150 °C when operating with SEM) Operating temperature, electronics Bakeout temperature, analyzer Connection flange Resolution at 10 % peak height Dwell time Reproducibility of peak ratio Supply voltage Weight 1) 2) 3)

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Compact mass spectrometer - PrismaPro-10

Order matrix and Accessories Order matrix PrismaPro® Order number Faraday only for leak detection and high-vacuum residual gas analysis C-SEM/Faraday; C-SEM = Continuous Secondary Electron Multiplier for fast, sensitive UHV residual gas analysis,analytical applications and leak detection Mass range Open ion source for high-vacuum residual gas analysis; high sensitivity and good linearity Crossbeam ion source for direct gas beam inlet, without interaction with the walls of the ion source; electron energy adjustable from 15 to 102 eV Grid ion source2) for UHV residual gas analysis; minimum outgassing...

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Compact mass spectrometer - PrismaPro-11

Accessories for external total pressure measurement1) Order numbers Connection cable, ActiveLine gauge–QMG 250, 0.6 m Order numbers Testbox for Standard I/O-Interface (15-pin Sub-D) Connection cable, 62-pin Sub-D, male/male, length: 1.52 m Gender changer, 62-pin Sub-D HD (female) Banana plugs for testbox, 4 mm, 2.5 mm² Simulator for ActiveLine gauges, adjustable Testbox for Extended I/O-Interface (62-pin Sub-D) Accessories for connecting and testing the I/Os Connection cable, DigiLine gauge–QMG 220, 3 m Gender changer, 15-pin Sub-D (male) Can be used only in conjunction with extended I/O connection...

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Compact mass spectrometer - PrismaPro-12

VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Are you looking for a perfect vacuum solution? Please contact us: Pfeiffer Vacuum GmbH Germany T +49 6441 802-0 All data subject to change without prior notice. PK 0115 PEN (May 2021/PoD) Benefit from our know-how and our portfolio...

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