A PASSION FOR PERFECTION PFEIFFER ^^VACUUM

Vacuum solutions from a single source Know-how book Vacuum generation Addresses sales and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Rotary vane pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Diaphragm vacuum pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124 Screw pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142 Multi-stage Roots pumps . . . ....

3.3 Chambers and components / Addresses sales and service Addresses sales Argentina Bermat S. A. Sales Agency Santiago Santiago T +56 2 231 8877 F +56 2 231 4294 [email protected] Scitek Australia Pty. Ltd. Sales Agency/ServicePoint Sydney Sydney T +61 2 9420 0477 F +61 2 9418 3540 [email protected] Hakuto Enterprises Ltd. Hong Kong T +852 2512 5717 F +852 2807 0511 [email protected] SV Vacuumservice Oy Sales Agency Helsinki Helsinki T +358-9-774 55 30 F +358- 9 774 55 330 [email protected] Pfeiffer Vacuum (Shanghai) Co., Ltd. Shanghai T +86-(0)21-33933940 F +86-(0)21-33933944 [email protected]...

3.3 Chambers and components / Addresses sales and service South Africa Pfeiffer Vacuum Benelux B.V. Culemborg T +31 345 478 400 F +31 345 531 076 [email protected] APP Machines Ltda. Sales Agency Bogotá Bogotá T +57 1 704 2311 F +57 1 703 8648 [email protected] Air & Vacuum Technologies (Pty) Ltd. Gauteng T + 27 11 318 3240/5 F + 27 (0)86 522 9188 [email protected] Secotec S.A. Sales Agency Caracas Caracas T +58 212 573 8687 F +58 212 573 1932 [email protected] Macedonia (FYROM) SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected] Spain...

3.3 Chambers and components / Addresses sales and service Addresses service Argentina Great Britain RUVAC S.R.L. ServicePoint Buenos Aires C. F. Buenos Aires T +54 11 4501 5129 F +54 11 4504 4122 [email protected] Pfeiffer Vacuum (Shanghai) Co., Ltd. ServiceCenter Shanghai Shanghai T +86-(0)21-33933940 F +86-(0)21-33933944 [email protected] Pfeiffer Vacuum Ltd ServiceCenter Livingston Livingston T +44 1506 418000 F +44 1506 418002 [email protected] Hakuto Enterprises Ltd. ServicePoint Hong Kong Hong Kong T +852 2690 2543 F +852 2690 2034 [email protected] Pfeiffer Vacuum...

3.3 Chambers and components / Addresses sales and service Pfeiffer Vacuum Italia S.p.A. ServiceCenter Agrate Agrate Brianza (MB) T +39 039 6899718 F +39 039 6899718 [email protected] Macedonia (FYROM) APVACUUM Sp.z o.o. ServicePoint Suchy Las, k. Poznania T +48 61 656 35 30 F +48 61 6100312 [email protected] Pfeiffer Vacuum Scandinavia AB ServiceCenter Stockholm Upplands Väsby T +46 8 590 748 15 F +46 8 590 748 88 [email protected] Pfeiffer Vacuum Italia S.p.A. ServiceCenter Roma Pomezia (RM) T +39 335 5284142 [email protected] Malaysia APP Engineering...

Vacuum chambers Vacuum chambers Vacuum chambers meeting the greatest of demands

Vacuum chambers Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 Overview of series and applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Features at a glance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 Standard vacuum chambers High vacuum chambers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 Medium vacuum...

Vacuum chambers Vacuum chambers Vacuum chambers meeting the greatest of demands At the heart of a vacuum system is the vacuum chamber that has been customized for the application. Pfeiffer Vacuum‘s vacuum chambers meet the highest quality and engineering standards providing vacuum solutions precisely designed to meet our customers‘ needs. They are used for medium vacuum to ultra-high vacuum applications and can also be designed, produced and tested as pressure chambers for overpressure of more than 500 hPa in accordance with the Pressure Equipment Directive (97/23/EC). The range of vacuum chambers...

Semiconductor Coating Industry Overview of series and applications R&D Vacuum chambers Electron microscopy Leak detection Mass spectrometry Surface analysis Plasma monitoring Residual gas analysis Lithography PVD (Physical Vapor Deposition) CVD (Chemical Vapor Deposition) Plasma etching Implantation – source Implantation – beamline Inspection Bonding MBE (Molecular Beam Epitaxy) Load locks, transfer chambers, handling systems Flat panel displays (FPD) LED / OLED Hard disk coating Photovoltaics Glass coating (PVD) CD, DVD, Blu-ray production (PVD) Optical coating (PVD) Wear protection (PVD, CVD)...

Temperature range Pressure range Nominal size Vacuum chambers 3.3 Chambers and components / Vacuum chambers TrinosLine standard vacuum chambers High vacuum chambers, cubical with stainless steel door High vacuum chambers, cubical with acrylic glass door High vacuum chambers, horizontal High vacuum chambers, vertical Medium vacuum chambers, vertical with acrylic glass cover Modular vacuum chambers

3.3 Chambers and components / Vacuum chambers Customer benefits ■ Full service from a single source ■ Vacuum solutions designed precisely for your application

Vacuum chambers Standard vacuum chambers Standardized chambers for your vacuum applications

3.3 Chambers and components / Vacuum chambers / Standard chambers Standard vacuum chambers Standard vacuum chambers are standardized shapes where you can select the port types and locations. They can be configured to the vacuum solution you Customer benefits ■ Proven robust design Typical applications PFEIFFERp* VACUUM

Vacuum chambers 3.3 Chambers and components / Vacuum chambers / Standard chambers Series High vacuum chambers High vacuum chambers are designed for a pressure range from ambient pressure up to 1 · 10-7 hPa. Standardized base bodies are available in three versions. Cubical, cylindrical-horizontal and cylindrical vertical. The nominal sizes range from 300 mm to 800 mm. Medium vacuum chambers Designed for a pressure range from 1 · 10-5 hPa to ambient pressure, the medium vacuum chambers are equipped with a transparent acrylic glass cover. Basic bodies are available in the nominal sizes of 320 mm...