ADH SERIES The new high-performance dry pumps for the latest process applications

The new high-performance dry pumps for the latest process applications The ADH series was developed specifically for applications in demanding processes of the Solar, Semiconductor and LED markets by offering 600 to 4,500 m³/h pumping speed. Semiconductor: High H2 pumping speed The ADH series performance brings the following advantages to your process: ■■ ALD process throughput: high pumping efficiency for light gases will permit faster chamber evacuation in between process steps. ■■ Epitaxy and EUV: high pumping speed and large flow rate tolerance matches the most demanding process specifications....

High resistance to process by-products The pumps are equipped with double temperature controlled water cooling circuits and integrated hot N2 purge to prevent powder accumulation or condensation. The powerful motor can handle big loads of powder and guarantees good restart capabilities. Also, carefully selected materials can withstand corrosive cleaning chemistries. Upgraded with a completely new monitoring system the features of the ADH series help to enhance process reliability. An idle mode is available to decrease the operating costs by lowering the power and nitrogen consumption when the...

The new high-performance dry pumps for the latest process applications WATER IN/OUT

Pumping speed ADH range pumping speed vspressure(N2) 5000 AD 4560 H pumping speed vs Roots frequency Pumping speedm3/h [m3/h] AD 4560 H with different Roots pump rpm with N2 5000 Roots pump at full speed Roots pump at full speed Roots pump at intermediate 2 Roots pump at intermediate speed 2 Roots pump at intermediate 1 Roots pump at intermediate speed 1 Roots pump at minimum Roots pump at minimum speed

Maximum continuous inlet flow - N2 Maximum continuous inlet flow - H2 400 slm Maximum volume to be evacuated 50 m3 Maximum ultimate pressure (50 slm N2 purge) 2 ■ 10-2 hPa Power consumption at ultimate pressure Max noise level at ultimate pressure and at maximum flow rate Power supply, 3 phases, 50/60 Hz1) Max. exhaust overpressure Min. cooling water flow rate for max. continuous inlet flow pump specification Cooling water temperature N2 purge flow range Oil fluid capacity Dimensions (L x W x H) Weight Inlet connection Exhaust connection Pump type Peak pumping speed - N2 Peak pumping...

Order number matrix ADH series Order number High voltage (380 - 480 V, 3 phases, 50/60 Hz) Dry pump temperature management Roots pump temperature management With check-valve Standard line Powder line

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