A 200 L Multi-stage Roots pump for light duty processes with the highest throughput in the integrated pump market

Top performance The new A 200 L guarantees highest throughput for load lock applications thanks to a 200 m3/h peak pumping speed, a low base pressure and its suitability for heavy duty cycles. As an illustration: The A 200 L is compatible with a cycle rate of up to 300 pump downs per hour on a 20 liters load lock chamber, which is over three times the maximum cycle rate of the 100 m3/h class A 100 L. The A 200 L is also suitable for other light duty applications -from the use in transfer chambers over SEM and PVD processes up to preclean chambers. He also can meet gas recirculation requirements...

Pumping speed Technical data Pump down curves on 20 liters Peak pumping speed Typical pump down time to 300 mTorr, 20 liters chamber Max. ultimate pressure Power supply voltages Power consumption Max. cycling frequency (20 l volume) Max. continuous inlet flow Max noise level at full speed Typical vibration level at inlet flange 10 - 1,000 Hz Cooling water Cooling water connection Dimensions l x w x h Weight Ambient temperature Inlet/exhaust size Tool interface RS-232/485 interface Variable speed Stackable 11 Ultimate pressure 2) Cycle dependent 3) Horizontal inlet only 200 m3/h 6.0 s 1 ■ 10-2...

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