Catalogs >
Pfeiffer Vacuum+Fab Solutions >
A 200 L - Multi-stage Roots Pumps

A 200 L - Multi-stage Roots Pumps
4Pages

Catalog excerpts

A 200 L Multi-stage Roots pump for light duty processes with the highest throughput in the integrated pump market

Top performance The new A 200 L guarantees highest throughput for load lock applications thanks to a 200 m3/h peak pumping speed, a low base pressure and its suitability for heavy duty cycles. As an illustration: The A 200 L is compatible with a cycle rate of up to 300 pump downs per hour on a 20 liters load lock chamber, which is over three times the maximum cycle rate of the 100 m3/h class A 100 L. The A 200 L is also suitable for other light duty applications -from the use in transfer chambers over SEM and PVD processes up to preclean chambers. He also can meet gas recirculation...

Open the catalog to page 2

Pumping speed Technical data Pump down curves on 20 liters Peak pumping speed Typical pump down time to 300 mTorr, 20 liters chamber Max. ultimate pressure Power supply voltages Power consumption Max. cycling frequency (20 l volume) Max. continuous inlet flow Max noise level at full speed Typical vibration level at inlet flange 10 - 1,000 Hz Cooling water Cooling water connection Dimensions l x w x h Weight Ambient temperature Inlet/exhaust size Tool interface RS-232/485 interface Variable speed Stackable 11 Ultimate pressure 2) Cycle dependent 3) Horizontal inlet only 200 m3/h 6.0 s 1 ■...

Open the catalog to page 3

VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a perfect vacuum solution? Please contact...

Open the catalog to page 4