UltraChem 40

UltraChem 40

UltraChem 40

Product catalog summary
Overview
The UltraChem® 40 Liquid Particle Counter is designed for reliable contamination monitoring, capable of detecting particles as small as 40 nm with high reliability. It is particularly effective in applications involving chemicals with high molecular scatter, thanks to its NanoVision Technology® which minimizes interference from fluid molecules.

Key Features
  • Particle Detection: Sensitivity to 40 nm particles with a large sample volume for enhanced data quality.
  • NanoVision Technology®: Adaptive technology that reduces optical contamination and accurately measures small particles in various chemicals, including PGMEA, photoresist solvents, HF, and sulfuric acid.
  • Cost Efficiency: Offers a 3-year warranty on the particle counter and a 1-year warranty on the electronic flow controller, featuring a solid-state laser diode and a simple design.
  • Versatility: Supports both online and batch sampling, multiple communication protocols, and has a compact design for flexible placement.

Applications
  • DI water monitoring (both cold and hot)
  • Chemical distribution monitoring
  • Chemical quality assurance
  • Immersion lithography

Specifications
  • Size Range: 40 – 125 nm with size channels at 40, 70, 100, and 125 nm.
  • Flow Rate: 5 ml/min with a nominal sample volume of 2 ml/min.
  • Maximum Concentration: 2,500 particles/ml in Monitor and Spectrometer mode, 15,000 particles/ml in High-Scatter mode.
  • Sample Temperature: 50 – 302 °F (10 – 150 °C).
  • Zero Count: Less than 20 counts/l.
  • Laser Source: Class I laser diode, compliant with US and EN standards.
  • Wetted Surface Materials: Sapphire, Teflon®, Kel-F®.
  • Dimensions and Weight: 17.5 x 18.75 x 11.75 inches, 35 lb (16 kg).
  • Power: 100 – 240 VAC, 1.25 Amp.
  • Communications: Ethernet (PMS protocol), 4-20 mA, RS-232 (setup only).
  • Calibration: Traceable to NIST and/or JIS standards.
  • Environment: Temperature 50 – 95 °F (10 – 35 °C), non-condensing humidity, indoor use only.

Electronic Flow Controller
  • Range: 2 – 20 ml/min with ± 10% accuracy.
  • Control: 0 – 10 VDC supplied by sensor.
  • Fluid Temperature: 50 – 176 °F (10 – 80 °C).
  • Fluid Pressure: Maximum 70 psi.
  • Wetted Materials: PFA/PTFE.
  • Communications: RS-232 for maintenance functions.
  • Operating Principle: Ultrasonic flowmeter with active PID needle valve control.

Contact Information
Headquarters: 5475 Airport Blvd, Boulder, Colorado 80301 USA. Phone: +1 303 443 7100, +1 800 238 1801. Email: [email protected]. Website: www.pmeasuring.com.
Global offices are located in Austria, Benelux, Brazil, China, France, Germany, Italy, Japan, Korea, Mexico, Nordic, Puerto Rico, Singapore, Switzerland, and Taiwan.
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Catalog excerpts

UltraChem 40-1

UltraChem® 40 Liquid Particle Counter Highly reliable particle counter with 40 nm sensitivity for high molecular scatter applications Your products need reliable contamination monitoring. You need to detect the smallest particle possible. Now get both – sensitivity to 40 nm particles with the greatest reliability available on the market. If your application requires measuring small particles in chemicals with high molecular scatter, UltraChem® 40 is the best tool for the job. NanoVision Technology® eliminates the competition between the light scattered by fluid molecules and particles. This makes 40 nm sizing possible for the first time. Background and false counts are a thing of the past. The NanoVision Technology breakthrough ensures only information that matches a particle fingerprint is counted. The result: Data you can act on with confidence. BENEFITS Detect Small Particles • 40 nm sensitivity • Large sample volume for improved data quality NanoVision Technology® • Adaptive technology makes the instrument immune to most optical contamination • See what your particle counter sees • Measures small particles in a wide range of chemicals, including high molecular scattering fluids. Chemicals include: • PGMEA • Photoresist solvents • HF • Sulfuric acid Low Cost of Operation • 3-year warranty on Liquid Particle Counter 1-year warranty on Electronic Flow Controller • Solid state laser diode • Simple design Versatile • Online or batch sampling capabilities • Multiple communication protocols • Small footprint allows placement in various locations DI water monitoring (cold and hot) Chemical distribution monitoring Chemic

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UltraChem 40-2

UltraChem® 40 Liquid Particle Counter Size range Electronic Flow Controller Size channels Flow rate Sample volume Maximum concentration 2,500 particles/ml, Monitor and Spectrometer mode 15,000 particles /ml, High-Scatter mode Fluid temperature Sample temperature Fluid pressure Zero count Laser source Laser diode Class I, complies with US 21 CFR 1040.10 and EN 60825-1; Internally an enclosed Class 4 laser is used per EN 60825-1 Wetted materials RS-232 (maintenance functions only) Wetted surface materials Sapphire, Teflon®, Kel-F® Operating principle Ultrasonic flowmeter with active PID needle...

 Open the catalog to page 2

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.