LiQuilaz® II S Series Particle Counting Spectrometer for Liquids BENEFITS Yield Improvement • Real-time characterization and analysis of particle contamination allows for immediate response to contamination • Volumetric measurements provide greater accuracy for tighter process control • Optional software makes process control easy with alarm settings, status conditions, sampler setup, and online help Versatile • Supports a wide range of applications and fluids • In-line and batch sampling capabilities • Works with compression or syringe samplers The LiQuilaz® II S series optical particle counters are volumetric particle counters with a variety of sizing sensitivities as low as 0.2 µm. They provide high-precision analysis for most process chemicals, including hydrofluoric acid and hot corrosive chemicals up to 306 °F (150 °C). LiQuilaz II sensors provide the same levels of accuracy, reliability and repeatability that customers have trusted for many years. LiQuilaz II sensors feature both RS-485 and Ethernet network communications. The new Ethernet capability increases product flexibility and makes installation significantly easier. Volumetric particle counters offer the highest precision possible by measuring 100% sample volumes (up to 80 ml/min) so that short sampling intervals can be utilized without sacrificing statistical significance. • Compatible with various tubing standards • RS-485 and Ethernet networking compatibility User-Friendly • Small footprint for easy placement anywhere in the process • Flexible software provides numerous viewing options for real-time or retrieved data • User-selectable particle size thresholds F E AT U R E S • 0.2 -3.0 µm size range • 80 ± 10% ml/min flow rate (50 ml/min ± 10% for S02) • Compatible with a wide range of process chemicals • Small footprint for easy placement anywhere in the process • User-selected particle size thresholds A P P L I C AT I O N S • Effervescent chemical measurements using compression sampling • Chemical quality assurance • Process bath monitoring • DI water monitoring • Chemical delivery systems • Photoresist m

LiQuilaz® II S Series Particle Counting Spectrometer for Liquids Size range User adjustable from 1 to 15 Flow rate 20 ± 10% mL/min available for all S series models for sampler applications Sample volume Maximum concentration* Sample temperature Zero count Pressure range Laser source Laser diode Wetted surface materials Sapphire, Teflon®, Kalrez® 4079 and Kel-F® Electrical rating Communication modes 5-wire, RS-485, DE9 connectors, PMS serial communications protocol, 10/100BaseT Ethernet, PMS Ethernet Protocol, Modbus TCP Materials used are traceable to U.S. National Institute of Standards and...