Without measurement there is no control

PARTICLE MEASURING SYSTEMS®a spectris We continually push the boundaries of contamination monitoring and control to enable clean manufacturers’ success by providing invaluable insights through: • Leading technology • Quality service • Collaborative solutions; and • Unmatched expertise. All made possible by our global team of dedicated and creative individuals. We are committed to doing things the right way, whether we’re interacting with our customers, employees, or technology. Our values of Be True, Own It and Aim High drive our pursuit of excellence. We’re proud to produce and reward a culture...

A History of Innovation How did we get to be the largest particle counter manufacturer in the world? Since 1972, we have solidified our technology leadership position by continually pursuing advanced detection technologies and regularly releasing new products that focus on current challenges and future needs of the industries we serve. Acquired by Spectris in 1996, Particle Measuring Systems is one of many operating companies focused on providing productivity-enhancing instrumentation and controls. Founded. First laser optical particle counter, the Knollenberg Probe, developed. Introduction of...

Office and Distributors Worldwide Headquarters Global Offices Belgium Brazil China Germany Italy Japan Korea Mexico Nordic Puerto Rico Singapore Switzerland Taiwan With more than 500 employees, over 35 distributors, and local sales and services in more than 50 countries, we’re local everywhere. To find and contact your local office / distributor scan the QR code or go to pmeasuring.com/contact 4

High-Performance Products PRODUCT RANGE AND SENSITIVITY Airborne Molecular Facility Monitoring Systems & Software (Facility Net, NS) Water Particulate Chemical Particulate Gas Particulate Liquid Sampling Software (SamplerSight)

Semiconductor Manufacturing Semiconductor Equipment Material Suppliers Display Manufacturing Power / Energy Clean AutoManufacturing motive Logic Memory Discrete Sensors MEMs Lithography ^stems Proce^ Transport Filters Chemicals Gases Slurries Substrates Garments LCD LED OLED HDD LED Optics Lasers Solar Oil Gas Aviation Space Electronics ^earf Mobile Manifold Multipoint Continuous Filter Test AMC Water Chemical Monitoring Gas Air Monitoring

Mobile Monitoring AEROSOL PARTICLE MONITOR PRODUCT RANGE AND SENSITIVI TY Lasair® III 110 Lasair® Pro Aerosol Particle Aerosol Counter Particle Counter HandiLaz® Mini II Airborne Particle Counter Lasair III 110 Lasair III 310/350 Lasair III 5100 The most basic approach to cleanroom monitoring is the use of mobile particle counters which are moved throughout the facility to periodically measure current contamination levels. This approach requires little capital investment but significant labor to implement. Advantages ■ Deploy rapidly ■ Lower capital cost than dedicated system ■ Useful for troubleshooting...

Airborne Molecular Contamination Continuous Monitoring of Critical Areas Chlorides PoU Ammonia/Amines/Acids PoU Chlorides Manifold AirSentry® II Point of Use AMC Monitoring System Ammonia/Amines/Acids Manifold Chlorides Mobile Cart Ammonia/Amines/Acids Mobile Cart 10 By changing the chemical, physical, electrical, or optical properties of highly engineered surfaces, airborne molecular contamination (AMC) can Advantages ■ Deploy rapidly ■ Lower capital cost than dedicated system ■ Useful for troubleshooting Advantages ■ Always measuring ■ Sample close to product ■ Improved process event correlation...

Mobile Gas Monitoring and High Purity Gas Component Testing Lasair III 110 Aerosol Particle Counter with HPD II In mobile gas monitoring, a high pressure diffuser reduces the non-reactive sample gas to atmospheric pressure, allowing a low cost portable aerosol particle counter to be used for quick troubleshooting anywhere along the gas line. Because they are not dedicated to any one location, the diffuser and particle counter can be rapidly deployed for immediate use. Fast sample intervals can identify transient events, and a simple setup and touchscreen user interface eases data collection and...

Ultra Pure Water Ultrapure Water Plants ULTRAPURE WATER PARTICLE MONITOR PROD UCT RAN GE A ND SENSITIVITY Ultra DI® 20 Plus Water Particle Counter This is particle monitoring of the highest quality. Ultrapure water systems used in semiconductor processing require very sensitive and stable particle counting instruments. These instruments provide actionable data throughout the UPW purification plant through unparalleled instrument matching to ensure optimized and stable system performance. A comprehensive UPW monitoring strategy is often used, utilizing progressively more sensitive particle metrology...

Incoming & Outgoing Quality Assessment Contamination Size (nm) CHEMICAL PARTICLE MONITOR PRODUCT RANGE AND SENSITIVITY Chem 20 SLS-20 Ultra Chem 40 Online Chemical Particle Counters SLS-1040 Chemical Particle Sampler Whether certifying outgoing chemical packages in a high-purity chemical packaging plant or testing incoming chemical tankers in a semiconductor manufacturing facility, chemical particle counters, samplers, and data analysis systems deliver critical particle data used to certify chemical purity levels. On-line or batch sampling systems enable testing and qualification of incoming...

Facility Management Systems Project Services Even small businesses with a single particle counter or other analyzer can benefit from a real-time monitoring system. Real-time monitoring systems can integrate data from a number of sources into a stable centralized database while providing powerful analytical and data mining tools to guide decision making. As systems become more complex, integrating data from many devices and processes, a powerful and centralized data management system becomes critical. In large corporations with many sites, wide area network connectivity allows data review across...