CAT-510-08 Rev 06/08 Process Advanced Filtration Division2340 Eastman Avenue Oxnard, California, USA 93030 Toll Free: +1 877 784 2234 Phone: +1 805 604 3400 Fax: +1 805 604 3401 [email protected] www.parker.com >

Withsales offices in 26 countries, distribution channels active in 63 countries, and manufacturing operations in 6 countries, Parker specializes in providing filtration and separation products to a wide variety of markets including the microelectronics, pharmaceu-tical, food and beverage, manu-facturing, automotive, oil and gas, and defense industries. > 1984 All-fluoropolymer filter cartridges 1987 All-polypropylene depth cartridges for economical prefiltration 1994 Hydrophilic polyethersulfone (PES) membrane for liquid filtration applications 1994 Hydrophobic PTFE membrane filters for general...

The microelectronics industry is a rapidly growing world market that draws upon core areas of our filtration expertise. Included within this market are the broad range of electronics products that require highly effective filtration in their manufacturing processes.These products include: semiconductors Օ flat panel displays hard disk drivesThrough our Technical, R&D and Customer Service teams we offer a wide range of services to en-sure total customer satisfaction. > Our Technical Services team is dedicated to the needs of the microelectronics industry. We have an extensive range of state-of-the-art...

In the microelectronics Industry, filter process fall into three categories: > 4 F basedDMSO/amino based CleaningPiranha (hot H > Օ EtchingSi etch (HF/HN0 > 3 / Acetic Acid)SiO > 2 SO > 4 /H > 2 O > 2 up to 150C) SC1 (NH > 2 etch (BOE/BHF-HF/NH > 4 OH/H > 2 2 /H > 2 O up to 90аC) SC2 (HCL/H > 4 F)Si > 3 N > 4 etch (Hot H > 2 O > 2 /H > 2 O up to 90C)Е Bulk chemical distribution > 3 PO > 4 up to 180C)Al etch (H > 3 PO > 4 /HNO > 3 /Acetic Acid) Е StrippingHydroxy/amino basedGlycol/NH > Photoresist applications l-line, g-line and DUV 248/193nm)Օ Anit-reflective coating applications (BARC/TARC)...

Rinse UPDI Water Etch H 2 O / HF Rinse > HOTUPDI Water

Clariflow: polyethersulfone membrane filters that provide ex-tremely high bath recovery rates during disk cleaning Clariflow SELECT: a high-flow version of Clariflow with longer life. All products enable high product yields and low reject rates, allowing for the lowest CPU (cost per unit). Fluoroflow: Fluoroflow SELECT: fluoropolymer filters suitable for the aggressive chemical environment found in the plating process a high-flow version of Fluoroflow with longer life Crucial to the manufacture of disk media is the nickel-plat-ing of the disks. This process is highly sensitive to both chemistry...

FLUOROFLOW > 100% Fluoropolymer construction FLUOROCAP > ή 100% Fluoropolymer capsules CHEMFLOW > PE > PTFE Membrane / High Density Polyethylene construction CLARIFLOW > ή Polyethersulfone (PES) Membrane / Polypropylene construction PROFLOW II > Parker offers a wide range of microfiltration products for critical liquid and gas applications, with particle removal ratings from 0.02 to 40 micron.Our products will consistently meet your exacting performance and compatibility requirements Ζ even in processes using aggressive chemicals. Our products can offer metal extractables <5ppb. At Parker we...

Filter Ratings(microns)SELECT* and UltracleanTypical Applications Product lineAvailable Configurations FLUOROFLOW 100% Fluoropolymer Construction Cartridge0.03, 0.05, 0.1, 0.2, 0.45, 1Ε Critical filtration of aggressive acids, bases, strippers, and solvents Available for high temperature applications S U XF XL > FLUOROCAP ծ 100% Fluoropolymer Construction Capsules Capsule 0.03, 0.05, 0.1, 0.2 Encapsulated filter for critical filtration of aggressive chemicals and process fluids under harsh conditions where the introduction of contamination during cartridge change out is a concernՕ Available for...

Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest > Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics,...

Materials of Construction 100% Fluoropolymer construction Effective Filtration Area 6.8ft > 2 (0.63m > 2 ) per nominal 10" (250mm) cartridge > *Per 10 (250mm) cartridge equivalent Metals Extractables* Standard: <20ppb (total) Ultraclean: <5ppb (total) > *in a 10% HNO 3 extraction 765 43 210 Maximum Differential Pressure/ Temperature Forward 80psid (5.5bar) @ 75ԺF (24C) 55psid (3.8bar) @ 167ںF (75C) 30psid (2.0bar) @ 257ںF (125C) 15psid (1.0bar) @ 300ںF (150C)Reverse 50psid (3.4bar) @ 75ںF (24C) 15psid (1.0bar) @ 250ںF (121C) Cleanliness (particle shedding) Wet-packed <2 particles/ml >0.2ڵm after...

Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at www.parker.com or through your nearest > Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics,...

Materials of Construction 100% Fluoropolymer construction > All components are thermally bonded to ensure integrity and reduce extractables. Effective Filtration Area 4.8ftβ (0.45 m) 4" (100mm) cartridge 9.8ftҲ (0.91 m) 10" (250mm) cartridge > *Per 10Ҕ (250mm) cartridge equivalent Metals Extractables* Standard: <20ppb (total) Ultraclean: <5ppb (total) > *in a 10% HNO 3 extraction Maximum Differential Pressure/ Temperature Forward: 80psid (5.5bar) @ 75F (24ںC) 55psid (3.8bar) @ 167F (75ںC) 30psid (2.0bar) @ 257F (125ںC) 15psid (1.0bar) @ 300F (150ںC)Forward HT option: 100psid (6.8bar) @ 75F (24ںC)...