MODEL NUMBERPRODUCTIVITYSUBSTRATE DIMENSIONS KXF-927D360 board per hour (when gold is etched 5 nm)50 mm x 20 mm250 mm x 70 mm0.5 mm to 2.0 mm RF parallel electrode typeAr (option:O > Min L x W to Max L x W SUBSTRATE THICKNESSCLEANING METHOD GAS FOR ELECTRICAL DISCHARGEELECTRIC SOURCE PNEUMATIC SOURCE DIMENSIONS > 2 ) * > 1 1-phase AC 200 V, 4.2 kVA0.49 MPa, 6.5 L/min (A.N.R.)1,764 mm1,045 mm 1,430 mm800 kg > W D H MASS > * 1 If an optional oxygen gas is chosen as a discharging gas, an exhaust-diluting nitrogen gas is also required.note: Please refer to the detail specifications. Chip on Board PSX303 size="-5">