Catalog excerpts
Digital Pressure Sensor with Auto-reference Function Digital Auto reference PRESSURE SENSORS High accuracy sensing at all times with autoreference function * Passed the UL 991 Environment Test * UL 61010C-1 compatible, Passed the UL 991 Environment Test based on SEMI S2-0200. [Category applicable for semiconductor manufacturing: TWW2, Process Equipment] [Applicable standards: UL 61010C-1] [Additional test / evaluation standards as per intended use: UL991, SEMI S2-0200] Example of air-leak test Threshold level Auto-reference function follows reference pressure changes Reference pressure • Unaffected by changes in reference pressure By an external signal, the set (threshold) values are corrected by being shifted by an amount equal to the pressure change. Hence, judgment by the sensor is as accurate as before the reference pressure change. This function is extremely suitable in places having intense variations in the reference pressure or where fine settings are required. Reference pressure Before reference pressure change Reference pressure Reference pressure Pressure sensor not incorporating auto-reference function After reference pressure change • Total cost reduction Till now...one sensor was required for each suction nozzle Since the threshold level differs with the suction nozzle, a sensor was required for each suction nozzle, increasing the cost significantly. ( Atmospheric ) pressure Suction nozzle for chip components For chip components Vacuum Before suction Suction OK Suction NG Suction over In case of DP3...operation efficiency UP! Since the threshold level can be automatically changed by the auto-reference function, two suction nozzles can be used, alternately, with one sensor. DP3-80 Suction nozzle for trimmers Auto-reference input Incorporates auto-reference function Threshold level for suction nozzle for trimmers Threshold level for suction nozzle for chip components Electromagnetic valve
Open the catalog to page 1Hysteresis Hysteresis Set Value 1 Set Value 2 Set Value 3 Set Value 4 (P-1) (P-2) (P-3) (P-4) High pressure (Positive pressure type) High vacuum (Vacuum pressure type) Set Value 1 Set Value 2 Set Value 3 Set Value 4 (P-1) (P-2) (P-3) (P-4) High pressure (Positive pressure type) High vacuum (Vacuum pressure type) Hysteresis: 1 digit (2 digits when using psi unit) Note: The auto-reference function acts only on Set Value 3 (P-3) and Set Value 4 (P-4) of Comparative Output 2. Note: The auto-reference function acts only on Set Value 3 (P-3) and Set Value 4 (P-4) of Comparative Output 2. Optimum...
Open the catalog to page 2PRESSURE SENSORS DP5/DPH Head-separated DP3 APPLICATIONS Confirmation of chip component suction The auto-reference function can compensate for the difference in suction levels due to suction nozzle separation distance. The vacuum type can be mounted close to the chip mounter suction head since it weighs only 70 g. Air-leak test for PET bottles Leak test mode, which is an output mode optimally suitable for an air-leak test, has been incorporated. It can reliably detect even a small air-leak. Because of the auto-reference function, it is safe even if the filling pressure varies. DP3-41...
Open the catalog to page 3OPTIONS Sensor mounting bracket MS-DPX Sensor mounting bracket (For standard type) Description Mounting bracket for standard type Two M4 (length 6 mm 0.236 in) pan head screws and two spring washers are attached. Back angled mounting bracket for standard type Two M4 (length 6 mm 0.236 in) pan head screws and two spring washers are attached. Changes the pressure port from female thread [Rc (PT) 1/8] to male thread [R (PT) 1/8]. Panel mounting bracket (For standard type) It can be used for mounting on a panel (1 to 3.2 mm 0.039 to 0.126 in thick). Front protection cover (For standard type) It...
Open the catalog to page 4PRESSURE SENSORS DP5/DPH Head-separated DP4 Type Item Vacuum pressure 101מkPa type Standard Light weight DP3-20 Rated pressure range Set pressure range (Note 1) Settable range (Note 2) Applicable fluid kPa, kgf/cm2, bar, psi, mmHg, inHg Current consumption Output modes Hysteresis DC-12 or DC-13 Equipped with 4 types of modes: hysteresis mode, window comparator mode, leak test mode, forced output mode (selectable by key operation) 1 digit (however, variable in hysteresis mode, variable for Comparative Output 1 only when using leak test mode, and 2 digits when using psi unit) Within %...
Open the catalog to page 5I/O CIRCUIT AND WIRING DIAGRAMS Wiring diagram Color code (Brown)םV Auto-reference (Pink) input (Note) (Black) Comparative Output 1 Internal circuit Load Load 100 mA max. (White) Comparative Output 2 (Blue) 0 V Users’ circuit Note: If you do not use the auto-reference input (pink), always connect it to םV (brown). Sensor circuit PRESSURE SENSORS Brown Load Pink Symbols ... D: Reverse supply polarity protection diode ZD1, ZD2 : Surge absorption zener diode Tr 1 , Tr 2 : NPN output transistor Operation • If setting is impossible even with pressing the MODE key, verify whether the...
Open the catalog to page 6PRECAUTIONS FOR PROPER USE All models Functional description PRESSURE SENSORS Error messages • When an error occurs, take the following corrective action. Error message Overcurrent due to short- Switch off the power supply circuit. and check the load. Applied pressure at the Pressure is being applied pressure port should be during zero-point adjust- brought to atmospheric presment. sure and zero-point adjustment should be done again. Positive pressure type Lights up when Comparative Output 1 is ON. Comparative Output 3 2 operation indicator (Green) Lights up when Comparative Output 2 is ON....
Open the catalog to page 7Setting • If key-protect has been set, make sure to release key-protect before operating the keys. (Please refer to ‘Key-protect function’ on p.817 for the procedure.) • Set Value 1 to 4 (P-1 to P-4) can be made common for all the output modes. • In the positive pressure type sensor, Set Value 2 (P-2) and Set Value 4 (P-4) can be set only towards the high pressure side with respect to Set Value 1 (P-1) and Set Value 3 (P-3), respectively. In the vacuum pressure type sensor, Set Value 2 (P-2) and Set Value 4 (P-4) can be set only towards the high vacuum side with respect to Set Value 1 (P-1)...
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