MOTOR STAGES Sigma FINE Piezo Stages Compact, Modular design Օ X, XY, XYZ, 2-axis tilt and rotation available Unique F/D digital closed loop sensor Active error compensation for precise linear trajectory control Օ New models include smaller 40mm sizes Improved resolution, stiffness, accuracy, linearity, load capacity and speed Օ Compatible with our FINE series of controllers Linear Stages Rotation Stages ZF Stages Motorized Optics Holders Goniometers GS Closed Loop Stages Controllers & Drivers Cables & Accessories Software Part No. 510-0041 -40.0 mm 6 holes: M3 DS Sensor Cable 1 32.0 mm 40.0 mm FINE Drive Cable 2 Counterbored holes: Clearance for M3 2 holes: 02.0+;00 mm T 20.0 mm ORDERING & TECHNICAL SUPPORT (949) 851-5881 FAX (949) 851-5058 [email protected] www.optosigma.com Jl OptoSigmsf 443

MOTOR STAGES Part No. 510-0044 -40.0mm- -«-32.0 mm-8.0 mm- Linear Stages Rotation Stages ZF Stages Motorized Optics Holders Goniometers GS Closed Loop Stages Controllers & Drivers Cables & Accessories Software FINE Drive Cable 32.0 mm 40.0 mm DS Sensor Cable - 2 Counterbored holes: clearance for M3 2 holes: 02.0 +_;°0 mm 6 holes: M3 1.5 mm- SFS H40Z(CL) 40mm CLOSED LOOP SINGLE AXIS (Z) STAGE Part No. 510-0061 -60.0mm 4 Counterbored holes: clearance for M4 60.0 mm 4 holes: M4 8 holes: M3 & TECHNICAL SUPPORT (949) 851-5881 FAX (949) 851-5058 E-MAIL [email protected] www.optosigma.com 16.0 mm...

MOTOR STAGES Part No. 510-0062 -60.0 mm Linear Stages Rotation Stages ZF Stages Motorized Optics Holders Goniometers GS Closed Loop Stages Controllers & Drivers Cables & Accessories Software 2 holes: 02.O+.;°O1omm 60.0 mm -DS Sensor Cable Connectors FINE Drive Cable Connectors 4 holes: M4 8 holes: M3 4 Counterbored holes: clearance for M4 Part No. 510-0063 -60.0 mm 2 holes: 02.0 +_:oo mm 60.0 mm - DS Sensor Cable Connectors FINE Drive Cable Connectors 4 holes: M4 8 holes: M3 4 Counterbored holes: clearance for M4 ORDERING & TECHNICAL SUPPORT (949) 851-5881 FAX (949) 851-5058 [email protected]...

MOTOR STAGES Part No. 510-0064 Linear Stages Rotation Stages ZF Stages Motorized Optics Holders Goniometers GS Closed Loop Stages Controllers & Drivers Cables & Accessories Software 4 Counterbored holes: clearance for M4 50.0 mm 32.0 mm 4 holes: M4 8 holes: M3 2 holes: 02.0 + OOmm FINE Drive Cable Connector DS Sensor Cable Connector X 28.0 mm Part No. 510-0015 FINE Drive Cable Connector -60.0mm--50.0mm- 60.0 mm & TECHNICAL SUPPORT (949) 851-5881 FAX (949) 851-5058 E-MAIL [email protected] www.optosigma.com Jl OptoSigma8 4 holes: M4 8 holes: M3 4 Counterbored holes: clearance for M4 7 j9.0 mm...

MOTOR STAGES Part No. 510-0016 50.0 mm- 4 Counterbored holes: clearance for M4 Linear Stages Rotation Stages ZF Stages Motorized Optics Holders Goniometers GS Closed Loop Stages Controllers & Drivers Cables & Accessories Software 50.0 mm 32.0 mm 4 holes: M4 4 holes: M3 -COARSE Adjustment - Approximate center of Rotation 1 25 mm Spcifications & Tolrances Dimensions: ±0.2mm Sensor Resolution: 10nm Straightness (Y and Z direction): 1um Piezo Linear Stages Resolution2: 1nm Linearity: <0.3% Positional Repeatability: X, XY, Z: <0.1um XYZ: <0.15um Travel 1 (mm) table Size (mm) Load Capacity (kg) Positional...