VT-5200/5700 Series
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Non-contact Thickness Meters/Displacement Meters (Electrostatic capacitance type) Non-contact displacement meters Non-contact thickness meters New advances have been made in displacement meters and thickness meters that use electrostatic capacitance, a method which has an established reputation for accuracy and stability. Non-contact measurement can now be performed in nanometer resolution, and a frequency response of 10 kHz has been realized. These instruments meet a wide range of applications, including the measurement of the thickness of conductors and semiconductors, and of the axial runout of rotating objects. They can be incorporated into production lines, and used for applications such as quality control and testing in a wide variety of fields.

High-accuracy non-contact measurement. Utilize the power of these meters for measurement CL-5600 Series Electrostatic capacitance-type non-contact thickness meters Built-in gap converter type CL-5600 Electrostatic capacitance-type non-contact thickness meter Electrostatic capacitance-type gap detectors Separate gap converter type Electrostatic capacitance-type non-contact thickness meter Electrostatic capacitance-type gap detectors (Includes the separate CL-0420 Gap converter x 2 pcs.) • Select the most appropriate combination to suit the sensor measurement range, required resolution and...

and control in a wide range of fields! VT-5200/5700 Series Electrostatic capacitance-type non-contact displacement meters Caution The electrostatic capacitance-type gap detectors, the electrostatic capacitance-type non-contact displacement meters and the electrostatic capacitance-type non-contact thickness meters are not, in principle, provided with an over-voltage safeguard for the sensors or sensor amplifiers. If the object under measurement is electrically charged, the sensor amplifier may be damaged. In addition, to prevent an adverse effect on the measurement accuracy, be sure to affix...

VE Series Electrostatic capacitance-type gap detectors Measurement principle The VE Series gap detectors measure and display the gap (displacement) from the electrostatic capacitance between the sensor and the target measurement object. The electrostatic capacitance C is a function of the area of the conductor that is facing the sensor S and the gap D. If the sensor and the conductor that it is facing (object under measurement) are parallel flat plates, we can use the following equation to obtain the gap D by measuring the electrostatic capacitance C. C= Sensor D : dielectric constant...

Sensor calibration Gap measurement cannot be performed when the target measurement object is an insulator. Examples of insulators include the following. (With a non-contact thickness meter, the thickness is obtained from the dielectric constant and calculation performed. Please refer to the section on non-contact thickness meters.) In order to keep the specified accuracy, the calibration has been performed for one-to-one each other of the sensor with the converter or the display unit before delivery. Recalibration is required if the sensor shall be replaced. • Plastics • Plastic film •...

CL-5600 Series Electrostatic capacitance-type non-contact th Outline The CL-5600 Series non-contact thickness meters use an electrostatic capacitance-type gap detector to measure conductors, semiconductors and insulators. The VE Series electrostatic capacitance-type gap detectors have shown proven results as non-contact electrostatic capacitance-type sensors, and enable high-accuracy, stable thickness measurement using easy operations. The CL-5600 Series offers both a conductor/semiconductor measurement function that uses two sensors (standard) and an insulator measurement function (option:...

hickness meters Measurement methods • When measuring conductors or semiconductors • When measuring insulators (CL-0300 Insulator measurement function) Install two sensors in parallel within the measurement range for the target measurement object. Specify the space (Gs) between these two sensors at the CL-5600 Series. Insert the target measurement object between sensors A and B and measure the gap between each sensor and the target measurement object (Ga and Gb) to obtain the thickness (t). Specify the space (Gs) between the sensor and the conductor (reference area) at the CL-5600 Series....

CL-5600 Series Electrostatic capacitance-type non-contact thickness meters CL-5600 Series Specifications CL-5600 Measurement parameters Display modes Interface SYNC function Remote functions Gap converter Measurable objects Display parameters Resolution Sampling time Averaging Display Comparator function (Option: CL-0100*3) Analog output (Option: CL-0100*3) Compatible printer (option) Power requirement Operatating temperature range (achieving the specified accuracy) Operating temperature range Operating humidity range External dimensions, weight Thickness of the conductor or semiconductor...

VT-5220/5700 Series Electrostatic capacitance-type non-contact displacement meters The VT Series comprises the VT-5200 Series with AC powered operation and VT-5700 Series with ±15 VDC specifications. 4 kHz or 10 kHz output response frequency is provided depending on the model to enable you to select the most suitable frequency for your application. Model name Output Temperature characteristic Response frequency Monitor display DC to 10 kHz 20-segment LED Analog output offset function Power requirement External dimensions, weight 95 (W) x 150 (H) x 195 (D), Approx. 2 kg Note: F.S. refers to...

Conductor/semiconductor thickness measurement Insulator thickness measurement (when the CL-0300 option is installed.) Measurement of a silicon wafer Example of the measurement of objects such as thin glass or crystal Non-contact thickness measurement of glass masks for semiconductors on a production line Wafer with orientation flat Personal computer Transparent glass (Wafer) Conductor VL-1520 Signal cable The measuring instrument and the sensors are connected electrically. CL-015 Wafer slide table CL-5600 Non-contact thickness meter CL-5600 Non-contact thickness meter Thickness measurement...