SMART Sensor Series Laser Displacement Sensor CMOS Type Stable, Easy & Affordable New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement Rough machine™ metal surface White coating Metallic luster

One Solution for Any Application Height/Length Level detection Thin connector assembly Shape validation for molded parts Positioning Double feed Robot hand positioning Warpage Tray warpage measurement Thickness PCB double feed detection Wafer thickness measurement New Laser Displacement Sensor CMOS Type ZX2 Series Realize stable measurements *1 Resolution 1.5µm Realize stable measurements at 10µm *2 *3 Linearity 0.05% F.S. Reliable measurement of moving objects Unaffected by environmental changes Measurement cycle 30µs Temperature characteristic*4 S./ C 0.02% F.S./°C*5 Stable Wafer Measurement...

Stable Measurement and Easy to Use Stable measurements in case of color/material and moving objects PAT.P Dynamic range of two million times For high reflectance, brightly colored workpiece CMOS Image Sensor Receiver element Use a low power laser beam! CMOS Image Sensor Use a high power laser beam! Stable measurements on objects with changing color/material Linearity characteristic of existing product according to material 1 0.8 0.6 0.4 0.2 0 -0.2 -0.4 -0.6 -0.6 -1 -10 -8 Linearity characteristic of the ZX2 according to material Linearity (%FS) Linearity (%FS) A line beam is used in addition...

Sensor head Sensor Heads for Various Applications-select the Range and Type of Beam New Regular-reflective Sensor Head Designed for Optimal Wafer Measurement ZX2-LD50L ZX2-LD50 Line beam type •Measurement range 50mm±10mm 1.5µm •Resolution Linearity Line beam ±0.05%F.S.*1 • *1 Spot beam •Beam size ZX2-LD50V Spot beam type (regular-reflective) Spot beam type ±0.10%F.S. Line beam •Measurement range 48mm±5mm 1.5µm •Resolution Linearity Spot beam ±0.3%F.S. • Spot beam Approx.60µm dia. •Beam size Approx.60µm×2.6mm Approx.60µm dia. Spot beam Spot beam Regular-reflective Precise measurement on micro-scale...

Support for Various Environments/Space-Saving The Smart Sensor Head Reliable measurements in harsh environments IP67, robot cable & temperature characteristic 0.02% F.S./°C IP67 protection class enables to use the sensor in harsh environments. A robot cable is used as standard between the head and amplifier, that the unit can be used reliably on moving parts. In addition, as 3D UV bond is used to fix the optical components rather than screws, stress can be controlled and a temperature characteristic 0.02% F.S./°C* is realized. * If the room temperature varies 1°C, the measured value varies 0.02%...

Amplifier unit + Calculating unit Ease of Use by “LED Display” and “Calculating Unit” 11-segment LED display for intuitive configuration Determination output indicators High (orange)/Pass (green)/Low (orange), two color display Intuitive operation through cross buttons 11 Segment LED Display Easy calculations of measurements 6

of user-friendiiness •••The Smart Amplifier Unit An 11 segment LED display is integrated in the compact housing. Alphanumeric characters can be read with ease and there is no need to Comparison of the existing 7 segment LED display The compact housing stays just as it is Perform two calculations with ease Thickness + subtraction mode The calculated results of two sensor heads are displayed on the amplifier unit by just connecting the calculating unit between the two amplifier units. The calculation function can be chosen from the two modes of thickness and subtraction. It is also possible to...

One Sensor for Any Measurement Application Height/ Length Height measurements prior to IC package sealing Stable measurements can be performed by the HSDR-CMOS image sensor and Omron’s proprietary algorithm, even for measurements on moving IC packages. Warpage Tray warping measurement before chip baking Even if there is temperature variation due to the ambient temperature, a die-cast is used for the optical base and so there is almost no fluctuation in measured value. Double feed PCB double feed detection Even if the color of the substrate changes, application of the HSDR-CMOS image sensor and...

Ordering Information Units Sensor Heads Appearance Optical system Sensing distance Beam shape Line beam Diffuse reflective 50±10mm 40 Spot beam Resolution 1.5µm 60 Model ZX2-LD50L ZX2-LD50 Line beam 100±35mm Spot beam 65 135 5µm ZX2-LD100L ZX2-LD100 48±5mm Regular reflective Spot beam 43 1.5µm 53 ZX2-LD50V Amplifier Units Model ZX2-LDA11 PNP Power supply Output type NPN Appearance ZX2-LDA41 DC Accessories (sold separately) Calculating Unit Appearance These are not included with the Sensor Head or Amplifier Unit. Please order as necessary. Model ZX2-CAL Sensor Head Extension Cables Cable Length...

Specifications Diffuse-reflective Sensor Heads Item Model ZX2-LD50L ZX2-LD50 ZX2-LD100L ZX2-LD100 Optical system Diffuse reflective Light source (wave length) Visible-light semiconductor laser with a wavelength of 660 nm and an output of 1mW max. EN class 2,FDA class II*5 Measurement center point 50mm 100mm Measurement range ±10mm ±35mm Beam shape Line Spot Line Spot Beam size *1 Approx. 60µm×2.6mm Approx. 60µm dia. Approx.110µm×2.7mm Approx.110µm dia. Resolution *2 1.5µm Linearity *3 ±0.05%F.S. (40 to 50mm) ±0.1%F.S. (entire range) Temperature characteristic *4 0.02%F.S./°C Ambient illumination...

Amplifier Units Item Model ZX2-LDA11 ZX2-LDA41 Measurement period *1 Min. 30µs Response time 60µs, 120µs, 240µs, 500µs, 1ms, 2ms, 4ms, 8ms, 12ms, 20ms, 36ms, 66ms, 128ms, 250ms, 500ms Analog output *2 4 to 20 mA, Max. load resistance: 300Ω, ±5VDC or 1 to 5 VDC, Output impedance: 100Ω Judgement outputs (HIGH/PASS/LOW: 3 outputs), error output NPN open-collector outputs, 30 VDC, 50 mA max. PNP open-collector outputs, 30 VDC, 50 mA max. (residual voltage: 1V max. for load current 10mA max., (residual voltage: 1V max. for load current 10mA max., 2V max. for load current above 10mA) 2V max. for load...