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ZS Series

ZS Series
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ZS Series

Product catalog summary
Overview: The document provides comprehensive information on OMRON's 2D CMOS Laser Type high-precision displacement measurement sensors, specifically the ZS-HL and ZS-L Series. These sensors are designed for diverse applications, offering high performance and precision in measuring distances and detecting objects.
Specifications: The ZS-HL Series features models with measuring center distances from 20 mm to 1500 mm and resolutions as fine as 0.25 µm. They support high-speed sampling rates and parallel output capabilities. The ZS-L Series is suitable for high-precision displacement measurements, including spot and long-distance detection.
Key Features: The sensors offer high-speed data logging and storage using external memory, multi-controller support for fast data transfer, advanced digital processing for enhanced performance, and various beam shapes for different applications.
Applications: These sensors are ideal for industries such as automotive, electronics, and semiconductors, used for tasks like measuring car body widths, glass thickness, and wafer warping.
Technological Advancements: Utilizing advanced CMOS technology, the sensors ensure stable and precise measurements even in challenging conditions, with digital processing and laser power algorithms enhancing accuracy.
Controllers: The ZS-HLDC and ZS-LDC controllers integrate advanced digital technology, supporting simultaneous measurement and output of up to four features, high-speed bank switching, and multitask mode for complex measurement tasks.
Sensing Capabilities: High-performance sensors are used for various applications, including glass measurement and detection of small recesses, employing 2D CMOS image sensors and laser technology for precision.
System Configuration: The Multi-Controller ZS-MDC allows high-speed connections for up to nine controllers, with the Data Storage Unit ZS-DSU facilitating efficient data logging and storage.
Specifications and Features: The document details specifications for sensor models, including LED indicators, ambient conditions, and material composition. Key features include LED indicators for range alerts, specific operating conditions, and protection ratings.
Sensor Heads and Controllers: Various sensor heads and controllers are detailed, including ZS-L-series Sensor Heads and ZS-MDC@1 Multi-Controllers, highlighting data resolution and logging functions.
Dimensions and Mounting: Detailed dimensions and mounting instructions are provided for sensor heads and controllers, including specific measurements for mounting holes and cable lengths.
Warranty and Liability: OMRON provides a one-year warranty against defects, with disclaimers on implied warranties and limitations on liability for damages.
Safety and Compliance: Safety precautions for laser equipment use are emphasized, including warnings against laser radiation exposure and instructions for attaching warning labels.
General Notices: The document concludes with notices about potential changes in product specifications, errors and omissions disclaimers, and copyright guidelines.
Contact Information: Contact details for OMRON offices in the USA, Europe, Asia Pacific, and China are provided for further assistance.
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Catalog excerpts

ZS Series-1

2D CMOS Laser Type High-precision Displacement Measurement Sensors Bringing Smart Sensors into New Fields.

 Open the catalog to page 1
ZS Series-2

ZS-HL Series Highly Advanced Sensing Fu Very High-performance Sensors that Support Core Quality from Very Long-range to Extremely Precise Measurements Range of models with measuring center distance of 20 to 1,500 mm. Achieves maximum resolution of 0.25 µm. Maximum response speed of 110 µs. Parallel output supported. Measuring center distance Record Data Storage Unit ZS-DSU ZS-DSU Enables full application of Sensor Controller information. Enables onsite high-speed logging of data in external memory (compact flash card) for the Sensor Controller or Multi-Controller. Effective for building traceability...

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ZS Series-3

Smart Sensor Advanced technology is carried Business card size +XX-XX-XXX-XXX +XX-XX-XXX-XXX High-performance Sensors nctions in a Compact Package More P.14 Standard Sensors Standard Sensors Most Suitable for a Variety of High-precision Displacement Measurements, Including Spot Detection, Wide-range Detection, and Long-distance Detection. Measuring center distance Expansion Units Beam Shapes Spot and line beam selection. Wide Range of Products Long-range, middle-range, and short-range models. Diffuse Reflective Sensors Sensor Controllers ZS-HLDC/LDC Enable maximum sensing performance with fully...

 Open the catalog to page 3
ZS Series-4

Main Applications High Performance ZS-HL Series Very High-performance Sensors that Support Core Quality from Very Long-range to Extremely Precise Measurements Sealer coating Ideal for measuring the thickness of silicone or compound semiconductor wafers in polishing and testing processes. Ideal for measuring the potting resin height for electronic components. Ideal for measuring liquid gasket (FPIG) application amounts. Prevents defects such as insufficient seal. Ideal for confirming positioning and repeatability accuracy of XY stages. Ideal for level detection for liquid crystal coaters and PDP...

 Open the catalog to page 4
ZS Series-5

Advanced technology is carried Applications by Industry Automobile and Automotive Parts Measuring Car Bodies Measuring Door Attachment Offsets Electronic Components Measuring Tire Exteriors Inspecting Board Heights Inspecting for Board Coplanarity Measuring Shape for Positioning Laminated Ceramics 1 axis scan Capacitor PCB SmartMonitor graph screen Spot beam Line beam Semiconductors Measuring Electrode Thickness on Compound Semiconductors Household Appliances and Audio-visual Measuring Wafer Warping and Thickness LCDs and PDPs Measuring Glass Undulation Simultaneous Measuring of Touch Panel Film...

 Open the catalog to page 5
ZS Series-6

High-performance Sensors High grade High-performance Sensors ZS-HL Series Product Lineup 2D CMOS High-end Displacement Sensors Advanced sensing technology packed into the best Sensor Head for the highest sensing precision Wide lineup of products from 0.25 µm high-resolution models to 1,500 mm long-range models. Measuring center distance 1500±500 mm Resolution 500 µm Linearity ±0.2%F.S. Beam shape 1.5 mm × 40 mm

 Open the catalog to page 6
ZS Series-7

Advanced technology is carried 2D CMOS Laser Image Sensing Element Very high resolution The three basics of sensing precision, speed, and sensitivity - can be balanced because ideal measurement settings can be made for light reception area. Digital Sensing Totally reliable measurements with completely digital sensing. High-performance Sensors All Models Are Class 2 Lasers. High Resolution at 0.001 µm (ZS-LD10GT) OMRON's digital sensing technology achieves unbelievably high resolution. (ZS-HLDS2T) Unique OMRON algorithms reduce Extreme stability detection error to improve workpiece measurement...

 Open the catalog to page 7
ZS Series-8

High-performance Sensors High grade High-performance Sensors Reduced Variation in Linearity between Different Objects, and Linearity Determines Measurement Accuracy. Makes it easier to introduce a variety of detection objects. Detect Essentially Any Object Measuring Car Body Widths Linearity Characteristic Model Measuring center distance Resolution Linearity Beam shape Specified range Beam shape Previous OMRON models Regular reflection 0.15 Specified range Model Measuring center distance Sample-A Sample-B Sample-C Sample-D Sample-E Note: Typical examples Manage trends by measuring widths of each...

 Open the catalog to page 8
ZS Series-9

Advanced technology is carried High-performance Sensors Ideal for Measuring the Height and Thickness of Transparent Objects Tilted and moving workpieces can also be stably measured. Resolution Linearity Beam shape Aspherical lens (newly developed) Limit angle ( ) Model Measuring center distance A special aspherical lens was developed for the ZS-HLDS2VT, and the design of the optical structure was optimized for regular-reflective workpieces. This has greatly increased the allowable degree of tilt and improved stability for measuring transparent and regularreflective workpieces. Previous OMRON...

 Open the catalog to page 9
ZS Series-10

High-performance Sensors High grade High-performance Sensors The Only Way to Very High-precision Measurements Superior Features for Semiconductor Wafer, Glass, and Other Measurements Requiring Precision Slim 26. 4m m Simultaneous Measuring of Touch Panel Film Thickness and Gap Measuring center distance Resolution Linearity Beam shape Film Glass Simultaneous measurement of transparent object thickness and gap An unbelievable stationary measurement precision of 0.25 µm, the highest in this product class. Ideal for Measuring Nozzle Gaps! Model Measuring center distance Resolution Linearity Beam...

 Open the catalog to page 10
ZS Series-11

Advanced technology is carried High-performance Sensors Technology With OMRON's sensing technology and newly developed algorithms, stable, high-precision measurement is possible of workpieces that were difficult to measure using laser displacement meters due to laser light penetration, transmission, excessive reflection, or insufficient light. Mechanisms for Stable Measurement Patent Pending Mechanisms for Stable Measurement Patent Pending Mechanisms for High Resolution Patent Pending No more errors due to reflection coefficients between glass gaps No more errors due to workpiece reflection coefficients....

 Open the catalog to page 11

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