LEXT OLS5000
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LEXT OLS5100 3D Measuring Laser Microscope Smarter Workflow, Faster Experiments

Practical Features for Efficient Experiments The LEXT™ OLS5100 laser scanning microscope combines exceptional accuracy and optical performance with smart tools that make the system easy to use. Precisely measuring shape and surface roughness at the submicron level is fast and efficient, simplifying your workflow and delivering high-quality data you can trust.

Simplify Your Measurement Testing Workflow The LEXT OLS5100 microscope’s Smart Experiment Manager* helps make your experiment workflow simpler by automating time-consuming tasks. ❯ Automate your analysis workflow with macro functions ❯ Measurement data can be easily organized ❯ Autopopulates data to your experiment plan matrix, reducing the chance of input errors ❯ Measurement results are displayed in a list, enabling you to make pass/fail judgments at a glance *Requires the experiment total assist application OLS51-S-ETA. Data You Can Trust LEXT objectives deliver highly accurate data,...

Experience the Advantages of a Laser Microscope Submicron 3D Observation/ Measurement Observe steps in the nanometer range and measure height differences at the submicron level. ISO25178-Compliant Surface Roughness Measurement Measure surface roughness from linear to planar. Fast, Noncontact, and Nondestructive No sample preparation required—simply place the sample on the stage and you're ready to measure.

Conventional measuring tools Optical microscope, digital microscope Unable to measure small shapes Poor lateral resolution Non-traceable measurement results Laser microscope 0.12 μm lateral resolution Traceable measurement results Stylus surface roughness tester Can damage the sample’s surface Information from only one line Difficult to place the stylus on a target position Noncontact measurement doesn’t damage the sample Acquire information from an entire plane Pinpoint measurement White light interferometer Has difficulty capturing rough surface shapes Poor lateral resolution makes...

LEXT™ OLS5100 Laser Microscope Basic Principles Configuration The LEXT OLS5100 microscope has two optical systems—color imaging and laser confocal—that enable it to acquire color and shape information as well as high-definition images. Laser confocal optics Color optics The color imaging optics acquire information using a whitelight LED light source and CMOS image sensor. Color imaging optics 3D shape information and high-definition images The laser confocal optics acquire confocal images using a 405 nm laser diode light source and a high-sensitivity photomultiplier. The shallow depth of...

X-Y Scanner The microscope’s optical scanner integrates the X-axis, which uses an electromagnetic induction MEMS resonant scanner, and the Y-axis, which uses a Galvano scanner, so the X-Y scanner can be located in a coupled position with respect to the objective’s pupil. The result is exceptional X-Y scanning with low scan trace distortion and fewer optical aberrations. Galvano mirror X-Y scanner Galvano mirror Laser light Objective Laser light Sample Conventional laser microscope (Proximal Galvano structure) OLS5100 microscope (2-axis integrated structure) Principles of Height Measurement...

Practical Features for Efficient Experiments Complete Your Measurement Tasks Up to 30% Faster Conventional experiments Prepare the experiment plan. Analyze data trends. Generate your data set. Specify the measurement conditions. Input the file name. Managing experiment conditions manually when testing new materials is challenging and complicated. 8

The OLS5100 can reduce your work time by up to Tolerance judgment Tolerance judgment Confirm pass/fail at a glance based on set tolerances. You can verify tolerances while changing threshold values. Automate your analysis workflow with macro functions ment result *Compared with the previous model Acquire analy and ze data. Automate your analysis workflow with the macro function Automated workflow from data acquisition to report generation. Modify experiment conditions on the fly Modify experiment conditions on the fly Data can be organized and verified under various condition settings,...

Smart Experiment ManagerDo Your Work Quickly Once you define the evaluation conditions, the Smart Experiment Manager saves you time by automatically creating the experiment plan. Then, just prepare your samples, put them on the stage, and press a button—the system does the rest. Execute No. Category Operation Parameter System Start analysis application Data acquisition ap... 3D File name:, Folder: C:\Users\10074... Analysis application Save report Folder: C:\Users\10074256.GSS\De... Analysis application Save as analysis template Folder: C:\Users\10074256.GSS\De... Analysis application Set...

Streamline Data Organization The software supports flexible experiments tailored to your workflow. If you haven’t determined the experiment conditions in advance, you can determine them while acquiring data. The conditions can be changed during the experiment, and images and analysis data can be easily added by dragging and dropping. The software also automatically adds values to your experiment plan matrix, reducing the chance of transcription errors that can lead to problems in the data. And in just a couple of clicks, you can export your experiment data to an Excel spreadsheet. Easy Data...

LEXT™ objectives deliver highly accurate data, enabling us to guarantee the microscope’s measurement accuracy. Paired with the Smart Lens Advisor, you can acquire data that you can be confident in.

Smart Lens Advisor To get accurate roughness measurements, it’s important to use the right objective lens. But how do you know which one to choose? We made this process easier with the Smart Lens Advisor. Simply enter some basic information, such as the field of view and the lens you intend to use, and the Advisor will tell you how appropriate your lens is to the application. Now you can be confident that you're using the right lens for the task. Take the Guesswork Out of Lens Selection In three easy steps, the Smart Lens Advisor takes the guesswork out of choosing the right objective lens...