Analyzers for Ultra-high Purity Gas Quality Control
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Analyzers for Ultra-high Purity Gas Quality Control For Semiconductor Manufacture

Analyzers for Ultra-high Purity Gas Quality Control Benefit from Trace Oxygen, Moisture, and Impurities Measurements with High-precision Analyzers and Gas Chromatographs The speciality gases used in manufacturing semiconductors must be high purity because of the detailed precision of the process. Even the presence of trace impurities measured in parts per trillion will result in the loss of whole batches of wafers. We offer reliable, repeatable measurements of key parameters with lower detection limits down to <100 ppt. Expertise in Products for Semiconductor Manufacture Our oxygen and...

Product Selector Application/Service Measurement Range Recommended Product Monitoring oxygen contamination of UHP gases Monitoring moisture contamination of UHP and speciality carrier gases 0...100 ppb V H2O, 0...10 ppmV H2O 50 ppmV H2O 100 ppmV H2O LDL 1 ppb V (Pura) -120...-40 °C dew point Fully fluronated compounds (FFCs), N2, H2, Ar etc Non-invasive leak detection in UHP gas distribution systems with mobile cart to less than 100 ppb O2 Monitoring oxygen contamination of UHP H2 scavenger gases used in atmosphere soldering and annealing copper films Confirming the purity of UHP speciality...

Analyzers for Ultra-high Purity Gas Quality Control LDetek L8000 Plus – Online PPB Trace Nitrogen in Argon/Helium Analyzer The LD8000+ is designed with the plasma emission detector (patented PED) maintained in an optimized controlled vacuum equilibrium to offer an extended collision energy level. The PED arrangement is designed with a valve network that allow to balance between 3 excitation sources. From each of the excitation source, an algorithm measures the PED response delta to convert that signal into a fast and drift free nitrogen reading. This unique design makes the LD8000+ analyser...

Analyzers for Ultra-high Purity Gas Quality Control Trace Oxygen Analytical Industries Inc GPR-1600 – Oxygen Analyzer for Industrial Gas Monitors oxygen in low parts per million in a variety of background gases. • Low measurement range 0...10 ppm • Long sensor life up to 24 months in <1,000 ppm O2 Analytical Industries Inc GPR-1200 – Portable Trace Oxygen Analyzer An economical and reliable portable analyzer for accurate measurements of trace oxygen. • Measurement ranges from 0...10 ppm up to 0...100 %O2 • Accuracy of better than 2 % of range • 24 - 32 months sensor life span (in normal...

Analyzers for Ultra-high Purity Gas Quality Control Process Sensing Technologies Process Sensing Technologies (PST) provides an unmatched suite of instruments, analyzers and sensors for precision measurements and monitoring in highly demanding end markets. These range from pharmaceutical/ life sciences, speciality gases, semiconductors, O&G, petrochemicals and power to gas detection, food and beverage and building automation. Using our products, customers save millions of dollars each year through increased energy efficiency in their processes and reduced process disruptions. The quality of...