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PROVIA Plasma System Brochure

PROVIA Plasma System Brochure
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PROVIATM Plasma System Superior Plasma Uniformity For High Throughput PCB Treatment March Plasma Systems’ PROVIATM System is specifically configured to meet the demands of today’s PCB Manufacturing Operations. Plasma treatment uniformity is a key operational feature in desmear and etchback applications for HDI, Flexible and Rigid circuit board manufacturing technologies. The PROVIA system delivers! The PROVIA platform is completely self-contained, requiring minimal floor space. The vacuum system, plasma chamber, control electronics and 40 kHz power supply are housed in a single enclosure. Full front and rear access allows for convenient service to all interior components. The pump is positioned on rollers for easy removal. No side access is required allowing for even greater floor space savings. Superior Uniformity Easy and Fast Loading of Panels Flex Panel Ready Proven, Robust Technology Application Specific Technology March PROVIA Plasma System The PROVIA system incorporates the best of March’s market leading technology combined with novel application specific technology development based on our greater than 25 years of experience. Through extensive Research and Development, the PROVIA system presents unique vacuum and gas flow technology, new electrode designs, and superior temperature management. The careful balance of these critical design elements and process recipe parameters delivers a system that creates the most uniform PCB treatment for key applications like desmear and landing pad cleaning. The PROVIA system’s superior performance capabilities are complemented by very attractive cost-of-ownership aspects. The system features a very compact and service-friendly design. The vertical loading concept and the use of easy loading carts minimizes any idle time generating high levels of productivity. The fast vacuum pump down and greatly enhanced process cycle times further add to the throughput and productivity of the system. Equipped with a touch-screen PC Operator Interface, the PROVIA system provides a wide breadth of control capability and data collection. Unlimited recipes can be stored for easy switching of plasma processes from batch to batch. Password protection ensures that no unauthorized entries can be made. Compact system consumes minimal floor space Patented, application specific features Designed and built for HDI, Flex and Rigid Panels Incorporates over 25 years of PCB plasma experience Backed by Experts

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System Specifications Enclosure Powder-coated aluminum Completely houses the process chamber, electronics, vacuum pump and RF generator Construction: Aluminum Internal chamber dimensions: 990 W x 825 H x 860 D (mm) 39 W x 32 H x 34 D (in.) Max. panel size (per cell) Std. electrode: 21 H x 26 D (in.) XL option: 24.5 H x 30.5 D (in.) Number of available cells: 13 Up to 5 mass flow controllers PLC with PC touch-screen interface Pump System 65 CFM dry pump with 612 CFM blower Facility Requirements Power: 200-230 VAC, 3 phase, 70A Process Gas: 0.25” Swagelok compression fittings 10-15 psig CDA:...

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