OverviewThe document discusses the inspection of integrated infrared (IR) components using NLIR's MIDWAVE
Spectrometer and PRECISION Interface. It highlights the advantages of these tools in providing fast and sensitive spectroscopy for IR devices such as coatings and filters.
Fast and Sensitive Spectroscopy
The MIDWAVE Spectrometer is designed to inspect IR devices efficiently, offering a bandwidth of 2.0 – 5.0 µm and a resolution of 6 cm⁻¹. It provides full-spectrum readout at a rate of 400 Hz, significantly faster than conventional FTIR spectrometers. The spectrometer's standard fiber coupling facilitates easy light transmission to and from samples.
Precision Interface for Integrated Optics Inspection
The PRECISION Interface addresses the challenge of transmitting maximum sample information to the spectrometer. It connects seamlessly with the FIBER Light Source and MIDWAVE Spectrometer using standard infrared fibers. The setup is suitable for examining small areas, with a measurement area less than 400 µm in diameter, ideal for integrated devices requiring high precision.
Fiber Reflection Probe Measurement
The effectiveness of the fiber reflection probe is demonstrated through the measurement of an integrated bandpass filter. A gold mirror was used as a reference, revealing a dip in reflectance at 4 - 7 µm, indicating the center of the bandpass filter. The probe provides high-quality spectra from small samples quickly, with a total measurement time of 100 ms.
Conclusion
NLIR's PRECISION Interface and MIDWAVE Spectrometer offer a reliable and efficient solution for inspecting small samples on integrated devices, providing accurate measurements in minimal time without the need for data smoothing or post-processing.
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