Website:
Nikon Metrology
Group: NIKON GROUP
Catalog excerpts
OPTISTATION-3100 Wafer Inspection System OPTISTATION-3100 Compact solution for 300mm wafer inspection in diverse applications
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Compact solution for 300mm wafer inspection in diverse applications Engineered to provide cost-effective support for 300mm wafers with a minimal footprint, the OPTISTATION-3100 features a new Micro/Macro system in a compact, flexible design. A new optical system offers brighter images, and observation techniques can be programmed for each objective magnification and each substrate layer to be inspected. This eliminates deviation from the inspection protocol and missed information through incorrect optical technique. Its flexible design enables the load ports to be positioned in accordance...
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