Catalog excerpts
Wafer Loaders for IC Inspection Microscopes NWL200 Series Wafer Loaders for IC Inspection Microscopes
Open the catalog to page 1Wafer Loaders for IC Inspection Microscopes Nikon s original technology ensures safe, reliable loading of thin wafers Works with 300µm wafers (Earlier Nikon models) (Earlier Nikon models) ever greater thinness. Nikon s outstanding proprietary technology makes the 725µm NWL200 Series the first lineup of wafer loaders for inspection microscopes capable Works with 200µm wafers of loading 100µm thin wafers. The NWL200 Series achieves highly reliable loading (The software is common to all models) Works with 100µm wafers In the semiconductor manufacturing process, wafers are following a trend...
Open the catalog to page 2Addition of Alignment sensor for Chemical Compound wafer (optional) The alignment of half transparent wafer which was difficult with conventional Waferloaders is now possible with the Nikon original optical system providing a safer transfer of Sapphire / Quartz / gallium arsenide substrate for LED. Additionally for devices such as MEMS which require process on the backside, non-contact backside inspection waferloader is now available. Transfer of Chemical Compound Semiconductor (Wafer) is possible Outstanding operability Anti-contamination measures for highly integrated production To prevent...
Open the catalog to page 3Mix and match options for a range of applications • Microscope system upgrades By combining the inspection microscope with an auto stage, auto focus unit, review software and other options, you can build the optimal system for your inspection application. • External communication functions With external communication functions, the NWL200 can be connected to a host computer and built into a network. The system can not only transfer data from inspection results online over an RS-232C link but can also be operated remotely. • Combined with a digital camera and imaging software Combined with...
Open the catalog to page 4Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. August 2017 ©2008-2017 NIKON CORPORATION N.B. Export of the products* in this catalog is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan. * Products: Hardware and its technical information (including software) TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING THE EQUIPMENT. NIKON CORPORATION Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku,...
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