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Eclipse L200N/L200ND/L300N/L300ND Series

Eclipse L200N/L200ND/L300N/L300ND Series
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Eclipse L200N/L200ND/L300N/L300ND Series - 1

FPD/LSI Inspection Microscopes FPD/LSI Inspection Microscopes FPD/LSI Inspection Microscopes

Eclipse L200N/L200ND/L300N/L300ND Series - 2

With improved observation and operation, and environmentally friendlier, For ø300mm wafer/Episcopic illumination type For 17-inch FPD/Episcopic and Diascopic illumination type Enhanced observation performance Epi-fluorescence observation widens inspection range—including 365 nm UV excitation (L300N/L300ND/L200ND only) • Diascopic illumination capability and various observation methods such as brightfield, darkfield, simple polarizing and DIC. Epi-fluorescence observation, including 365 nm UV excitation, is also possible (L300N/L300ND/L200ND only). • Highly beneficial in inspection of...

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Eclipse L200N/L200ND/L300N/L300ND Series - 3

the four ECLIPSE models are ideally suited for inspection of large FPD/LSI. For ø200mm wafer/Episcopic illumination type For ø200mm wafer/Episcopic and Diascopic illumination type Enhanced environmental consideration and operation High-intensity 12V-50W halogen illuminator is brighter than that of a standard 12V-100W illuminator The motorized universal nosepiece is three times more durable than conventional models • Employs the LV-LH50PC precentered lamphouse, which offers greater brightness than that of a 12V-100W illuminator at half the power consumption. It is adequate for observation of...

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Eclipse L200N/L200ND/L300N/L300ND Series - 4

Improved functionality between the microscope and digital cameras provides Optimized workflow observation, image capture and analysis • Nikon's simultaneous development of microscopes, digital cameras and imaging software has enabled it to develop a highly functional easy-to-use digital imaging microscopy system. • All aspects of image flow are supported, including setup for best viewing conditions, digital image capturing, processing and analysis. Digital camera/ control unit Objective configuration/ motorized nosepiece control • Objective magnifications, which provide the most important...

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Eclipse L200N/L200ND/L300N/L300ND Series - 5

ideal imaging Camera control unit • Operations, from advanced image capture to image processing and analysis, are all controlled from a PC. • Control of the camera, peripherals and microscope are all integrated within NIS-Elements imaging software. • The IEEE 1394b device port enables high-speed live image display and fast response at speeds surpassing the previous model. Imaging software for high-quality image acquisition, processing and analysis, Interactive measurement EDF (Extended Depth of Focus) NIS-Elements offers diverse measurement parameters, such as distance, area, radius and...

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Eclipse L200N/L200ND/L300N/L300ND Series - 6

Wafer loaders NWL200 series In combination with the ECLIPSE L200N, the NWL200 meets the requirements for inspection of the latest wafers. Nikon's outstanding proprietary technology ensures reliable loading of ultra-thin 100 pm wafers. Support for ultra-thin 100 pm wafers • Nikon's new chuck system allows reliable loading of ultra-thin 100 |tm wafers. • In combination with the ECLIPSE L200N, the NWL200 series provides levels of safety and reliability that meet all requirements for inspection of the latest wafers. Improved wafer-sensing functions • With optimal arrangement of the wafer sensor...

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Eclipse L200N/L200ND/L300N/L300ND Series - 7

System diagram ECLIPSE L300N/L300ND TV Camera Adapters TV Camera Lenses Tilting Eyepiece Tube L2-TTA/L2-TT2A C-mount Direct Adapter C-mount Adapter 0.7x Filar Micrometer EPI-FL Filter Block L-DIC DIC Prism L-DIHC DIC Prism HC L3N-FIAD Fiber Guide Adapter HG Precentered Fiber Illuminator Intensilight C-HGFIE * Diascopic illumination: L300ND only L3-RPOD Rotatable Polarizer D YM-EPI 3-pin Extension Cord L2-BG Breath Shield Plate IEEE 1394b (Required for simultaneous use of Episcopic and Diascopic illuminator) ・ Support Tools (SDK, Setup) L ・ NIS-Elements ECLIPSE L200N/L200ND TV Camera...

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Eclipse L200N/L200ND/L300N/L300ND Series - 8

Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. December 2011 ©2010-2011 NIKON CORPORATION NIKON CORPORATION Shin-Yurakucho Bldg., 12-1, Yurakucho 1-chome, Chiyoda-ku, Tokyo 100-8331, Japan phone:+81-3-3216-2384 fax:+81-3-3216-2388 http://www.nikon.com/instruments/ for NIKON CORPORATION for NIKON CORPORATION Instruments Company NIKON METROLOGY, INC. 12701 Grand River Avenue, Brighton, MI 48116 U.S.A. phone: +1-810-220-4360 fax: +1-810-220-4300 E-mail:...

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