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Optical Interferometric Microscope System BW-S500/BW-D500 Series

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Nikon's proprietary scanning-type optical interference measurement technology achieves 1 pm* height resolution. * Height resolution speciﬁed by algorithm Quickly and accurately measures surface proﬁle from sub-nano to millimeter height ranges, using a single measurement mode. Fully supports high-precision processing technology and advanced material development of the Materials Science ﬁeld. camera type BW-S501/BW-S502/BW-S503/BW-S505/BW-S506/BW-S507 Effective height resolution Measurement speed 15 pm (including environmental noise) 8 seconds (1022×1022 pixel mode, 10 µm scanning) (2046×2046...

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Six models available to match application and cost Both the BW-S and BW-D are available in the six types shown below. Piezo driven Electric XY axis Nosepiece 503/507 drive piezo Objective Nosepiece lens drive drive Manual Electric Manual Electric Enables wide-area analysis through the stitching of multiple height images. Enables measurement of steps in excess of 100 µm (piezo scanning range). 505/506/507 Allows easy switching of objective lens magniﬁcation. * An affordable objective lens drive piezo is also available. High-precision/high-speed image acquisition via a two beam interference...

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High Accuracy and The BW-S500/BW-D500 series is calibrated by an 8 nm or 8 pm VLSI Step Height Standards sample, certified by the NIST. Achieves extremely high accuracy and repeatability as a height measurement system. VLSI (8nm Step Height Sample) Height Measurement Value Variations (using BW-S507 with LED) Measured value unsusceptible to variation of central wavelength of light source With Nikon's proprietary technology, measurement values with the BW-S500/ BW-D500 series are independent of central wavelength of light source. Measurements can be done immediately after switching on...

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Wide region conﬁguration analysis with stitching Electric XY stage and "Digital Stylus Imager 3" software allow stitching with BW-S503/507 and BW-D503/507. Stitching can be done in both vertical and horizontal direction. One-shot image Automatic acquisition of speciﬁed shot images -64 µm Stitching of acquired images (at 5×5 FOV) Adjustment of height display range 3D Display Capable of ø20mm order wide region stitching at 10 µm order range.

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Analytical software spanning basic measurement to advanced analysis Image Transformer Zernike Polynomial Analyzer Performs automatic measurement of distance, height and angle between two points speciﬁed by the cursor, as well as two-dimensional roughness (Ra, Rq, Rz) / three-dimensional roughness (Sa, Sq, Sz) From the height image of a spherical sample, the ideal spherical surface curve (geometric shape) for the sample's form is calculated, allowing analysis of the sample's surface roughness. Height image Display of cross-section proﬁle and measurement results at position speciﬁed on the...

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Optical Microscope Unit Piezo Driven Objective lens driven Nosepiece driven Objective lens driven Nosepiece driven Piezo Scanning Range Correction Plane Term Correction, Quartic Term Correction Digital Enlargement 1/100 sub-pixel processing Roughness Measurement 2-dimensional roughness (Ra, Rq, Rz), 3-dimensional roughness (Sa, Sq, Sz) Profile Display Cursor measurement of height, distance, and angle between two points; measurement of approximate circle radius of location specified in the profile Output Output of processed images and roughness indices to an Excel file Automatic Processing...

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BW-S507 Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. May 2019 ©2014-2019 NIKON CORPORATION N.B. Export of the products* in this brochure is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan. *Products: Hardware and its technical information (including software) TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING THE EQUIPMENT. Nikon NIKON CORPORATION Shinagawa Intercity Tower C, 2-15-3, Konan,...

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