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AMI-3000
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Catalog excerpts

AMI-3000 - 1

Automatic Macro Inspection System I Featuring High Throughput and Exceptional Sensitivity The AMI-3000 automatic macro inspection system brings together all of Nikon's expertise in semiconductor manufacturing to enhance macro inspection precision, providing quantified reference criteria and enabling more efficient process management. The AMI-3000 offers a substantial increase in yield.

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AMI-3000 - 2

Automatic Macro Inspection System High Detection Sensitivity Nikon's exclusive diffracted light detection system detects pattern variation, due to defocus by the stepper or uneven coating by the coater, with excellent sensitivity. Our proprietary algorithms accurately recognize diffracted light from the top pattern layer, making it possible to identify defects in underlying patterns. Inspection of Entire Surface of Every Wafer Offers Higher Throughput Capturing the entire wafer surface in a single image provides one of the world's highest throughputs for an automatic macro inspection system...

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