Vacuum Pad for Flat or Round Work-piece Standard Series ■ Pad shape : 3 types Small ▷ Small work-piece and semiconductor facility. General ▷ Best suitable for flat work-piece. Flat work-piece : Work-piece with enough hardness and thickness Deep ▷ Suitable for round fruit or ball. Round fruit : Apple, etc. selection of pad sizes, materials and holder types. Pad size：20sizes.　Pad material：10types.　Holder type：14types. ■ Stroke length of a spring holder is selectable. ・ Conventional long stroke holder (with cover) is integrated into VPC or VPD. Stroke：3, 6, 10, 15 and 20 mm ・ Conventional long stroke holder (without cover) is renewed as VPOC or VPOD. Stroke：20, 30, 40, 50mm of selections in pad holder for "Copper alloy free" and against "low ozone concentration". -S3 spec.：No copper based metal parts. HNBR or FKM i

Vacuum Pad Series Vacuum Pad Standard Series ■ Selection list Small Recommended work-piece Small work-piece or in semiconductor manufacturing facility Holder size Holder type Round fruit like an apple, or round ball Nitrile rubber, Silicone rubber, Urethane rubber, Fluoro rubber, Conductive silicone rubber, Conductive butadiene rubber (Low resistance), Conductive NBR (Low resistance), Food safe NBR( ※ ), HNBR, EPDM Flat work-piece with enough hardness and thickness Nitrile rubber, Silicone rubber, Urethane rubber, Fluoro rubber, Conductive silicone rubber, Conductive buradiene rubber (Low resistance),...

■ Model designation of Pad rubber only (Ex.) VP Code 0.7 1 1.5 2 Size (mm) ø0.7 ø1 ø1.5 ø2 Small ○ ○ ○ ○ General ○ ○ Deep ※ 1.Available size for Conductive silicone rubber, Conductive butadiene rubber (Low resistance) and Food safe NBR is limited to ø1~ø50mm. ※ 2.Deep type is not available for Conductive silicone rubber and Conductive butadiene rubber (Low resistance). ④ .Pad type Code Type ⑤ .Pad material / Application Code Rubber material Nitrile rubber Silicone rubber Urethane rubber Fluoro rubber ○ ○ ○ Application Cardboard Plywood Iron plate Food-related Other general work-pieces Small General...

Vacuum Pad Series Vacuum Pad Standard Series ■ Vacuum Pad dimension (Small type) Weight : 0.04g[0.06g] ※ Weight in [ ] is the weight of Fluoro rubber. ■ Drawing of Vacuum Pad and Holder Joint (Small type) VP 0.7~1.5RM5 Model code Connection config. code ※.5 in Model code : Replaced with Pad rubber material code. refer to page 492 for details. ■ Dimensions of Pad Insersion Part VP0.7~4RM5 Connection configurati

■ Vacuum Pad dimension (Standard type) ※ Weight in [ ] is the weight of Fluoro rubber. is ※ Pad model code : VP1RNE (Pad dia. : ø1mm, Pad material

Vacuum Pad Series Vacuum Pad Standard Series

■ Vacuum Pad dimensions (Deep type) ø15 ø6 ※ Weight in [ ] is the weight of Fluoro rubber.

Vacuum Pad Series Vacuum Pad Standard Series ■ Drawing of Vacuum Pad and Holder Joint (General・Deep type) VP6, 8R5 Plain washer Plain washer Plain washer Plain washer Plain washer . cogModel code Pad rubber only Pad & screw set Connection config. code 1.5 ※ 1.5 in Model code : Replace with Pad rubber material code. Refer to page 492 for detail

■ Model designation of Pad & screw set (Ex.) VP -M6 ⑨ -S3 spec. ⑥ Connection configuration code For ② , ④ and ⑤ , refer to "Model designation of Pad rubber only (Ex.)" on page 492. ⑥ .Connection configuration code Code Thread size Applicable pad size (mm) -S3 Metal parts : Copper alloy free material Seal parts : FKM or HNBR ■ Dimension of Pad insertion part ■ Dimension of Pad insertion part Connection configuration code : -T8 Connection configuration code : -M4 Connection configuration code : -M6 Connection config. code(ø150, ø200mm) :-M20 Unit : mm Material : Electroless nickel-plated brass

Vacuum Pad Series Vacuum Pad Standard Series ■ Pad support dimensions øD3 øD1 ■ Plain washer dimensions Material : Electroless nickel-plated steel iron Unit : mm Pad support model code VPW40 VPW50 VPW60 Material : Aluminium ■ Table of Connection configuration code., etc for connection of pad and holder 499 Small General General / Deep Connection configuration code Model code of Pad & screw set (5 : Replaced with pad material code) Mount type (Direct connection) Insert type (Direct connection) Mount type (Direct connection) -M6 Screw type (Connection with screw) Connection type

Pad frame model code VPH80R VPH100R VPH150R Applicable pad model code VP80R(A)5 VP100R(A)5 VP150R5, VP200R5 Material : Aluminium Plain washer Table of complement parts model code Pad support Pad frame Hexagon socket head bolt Rubber packing － － － － VPH80CS-SET (4pcs of bolts) VPH100CS-SET (4pcs of bolts) VPH150CS-SET (6pcs of bolts) － － － － VPH80P-SET (4pcs of packings) VPH100P-SET (4pcs of packings) VPH150P-SET (6pcs of packings)

Vacuum Pad Series Vacuum Pad Standard Series ■ Model designation of Holder + Pad (Ex.) VP -6J ⑨ -S3 spec. ⑧ Filter (Option) Vacuum pad ① Holder type ME Mini − Slim E Standard − No cover Type Fixed type / Direct mount MC SC C OC Spring type / Top port Mini Slim Standard No cover Type − Mini − Slim F Standard − No cover Type Spring type / Direct mount MD − D OD Spring type / Side port MB − B − Fixed type / Side port Mini Slim Standard No cover Type Mini Slim Standard No cover Type MA − A − Fixed type / Top port Mini Slim Standard No cover Type ⑦ Free holder or Fall prevention valve (Option) ⑥ Port...

④ .Pad type Code Type ⑤ .Pad material / Application Code Material Type Small General Deep Application N Nitrile rubber ○ ○ ○ Cardboard Plywood Iron plate Food-related Other general work-pieces S Silicone rubber ○ ○ ○ Semiconductors Taking out molded parts Thin workpieces Food-related U F SE Urethane Fluoro Conductive rubber rubber Silicone rubber ○ ○ ○ ○ ○ ○ ○ ○ − Cardboard Chemical Semiconductors Plywood environment Taking out Iron plate High temp. molded parts work-pieces Thin workpieces Food-related E Conductive Butadiene rubber (Low resistance) ○ ○ − General parts of Semiconductors NE G Conductive...