VACUUM EXTERNAL VACUUM GENERATOR CONTROLLER VACUUM PAD VACUUM ACCESSORIES Complex Vacuum Generator realizing Stable and High-Speed Response Vacuum Generator for semiconductor industry such as IC chip loader or IC handler. for the application requiring a limited space. Compact and lightweight ejector unit. The body height is lowered in particular for small space use. ● Stand-alone type ● Manifold type Height

Vacuum Generator Series VACUUM GENERATOR Vacuum Generator VN ■ Characteristics variety of combinations enables to meet various applications. External Vacuum Controller for a vacuum pump, VNP Series, is also available. (P.394). response time. (ON / OFF = 5msec or less) Direct operated solenoid valve is used for the main valve. ON ●Vacuum generator VN →Vacuum level →Vacuum level ●Conventional vacuum generators Pilot valve signal Vacuum Pilot valve signal Vacuum High-speed response Atmospheric pressure →Time Dispersion of response time is Atmospheric pressure →Time Dispersion of response time is...

20ℓ／min for blow-off air rate. (Supply pressure: 0.5Mpa) 25 20 15 10 types of analog output sensors are selectable. Analog output type vacuum pressure sensor for negative pressure, Separate LED indicator + Analog output type vacuum pressure sensor for negative pressure, Analog output type sensor for compound pressure, Separate LED indicator + Analog output type sensor for compound pressure Analog output type sensor Negative pressure Compound pressure Separate LED indicator + Analog output type sensor Negative pressure Compound pressure VACUUM ACCESSORIES Blow-off air rate (l/min[ANR]) VACUUM...

Vacuum Generator Series VACUUM GENERATOR Vacuum Generator VN ■ Model Designation of Stand-Alone Type (Example) VN Complex Vacuum Generator ① Vacuum characteristics ③ Air supply port for suction ⑦ Vacuum sensor ⑥ Voltage specification ⑤ Exhaust type ④ Air supply port for blow-off air ① Vacuum characteristics Vacuum characteristics E04 H05 E05 H06 E06 ※ The values in the table are reference values only. Suction flow varies according to the vacuum system conditions; vacuum port dia. or tube length. ② Vacuum port (Applicable tube size) 285 VH · VS VU VUM VY VB VM · VC VRL VG VK VJ VX VQ VZ VN 3 4...

※ Including 2 hexagonal socket head screw (M3 x 12) ■ Model code of Silencer Element for Stand-Alone Type (Maintenance parts) VN012B33 VACUUM EXTERNAL VACUUM GENERATOR CONTROLLER ■ Model code of Bracket for Stand-Alone Type (Option) VACUUM PAD VACUUM ACCESSORIES

Vacuum Generator Series VACUUM GENERATOR Vacuum Generator VN ■ Model Designation of Manifold Type (Example) VN Vacuum Generator ① Vacuum characteristics ③ Air supply port for suction ① Vacuum characteristics Vacuum characteristics E04 H05 E05 H06 E06 K ⑥ Voltage specification ⑤ Exhaust type ④ Air supply port for blow-off air Air consumption Suction flow Rated supply pressure Final vacuum (l/min[ANR]) (-kPa) (l/min[ANR]) (MPa) 6 2 0.35 11.5 7 0.5 ø0.5 8 3 90.4 0.35 16 9.5 0.5 ø0.6 12 5 0.35 When different vacuum characteristics are mixed on a manifold (Fill in the details on Specification Order...

VACUUM EXTERNAL VACUUM GENERATOR CONTROLLER VACUUM PAD VACUUM ACCESSORIES ⑤ Exhaust type S Silencer vent Code Exhaust type ※ Tube exhaust is not available for Manifold type. Code Voltage ⑦ Vacuum sensor No code Code Without vacuum switch Switch V1 Code V2 Switch Analog output type vacuum sensor for negative pressure Separate LED indicator + Analog output type vacuum sensor for negative pressure Code R1 R2 Switch Analog output type sensor for compound pressure Separate LED indicator + Analog output type sensor for compound pressure Code K Switch When different vacuum sensors are mixed on a manifold...

Vacuum Generator Series VACUUM GENERATOR Vacuum Generator VN ■ Specification Order Form (example) Vacuum generator type VN L St. 1 St. 2 St. 3 St. 4 St. St. 5 no. St. 6 St. 7 ➡ St. 8 St. 9 St. 10 R Vacuum port Air supply port Air supply port Exhaust type for suction (PV) for blow-off air (PS) ⑤ ② ③ ④ ※ Station no. is arranged St.1, St.2 … St.10 from L side. St. 3 St. 2 St. 1 Air supply port for blow-off air (PS) Air supply port for suction (PV)

To: NIHON PISCO CO., Ltd. Name : Requested EX-W PISCO Date : VACUUM ACCESSORIES Vacuum generator type VN L St. 1 St. 2 St. 3 St. 4 St. St. 5 no. St. 6 St. 7 ➡ St. 8 St. 9 St. 10 R VACUUM EXTERNAL VACUUM GENERATOR CONTROLLER Vacuum Generator VN Series Specification Order Form Vacuum port Air supply port Air supply port Exhaust type for suction (PV) for blow-off air (PS) ⑤ ② ③ ④ ※1. Refer to the previous page to fill in the form. ※2. Copy this page and use. ※3. Use this specification

Vacuum Generator Series VACUUM GENERATOR Vacuum Generator VN ■ Construction of Individual air supply port, Silencer vent, Vacuum sensor Blow-off air rate adjustment needle Connector Blow-off valve Suction valve Sensor unit Air supply port for suction Vacuum port Air supply port for blow-off air Silencer element ■ Construction of common air supply port, Tube exhaust, Without vacuum sensor Blow-off air rate adjustment needle Connector Blow-off valve Suction valve Vacuum port Exhaust port ■ Construction of Manifold type, Vacuum sensor Blow-off air rate adjustment needle Connector Blow-off valve...

① Suction valve: OFF (At vacuum generation suspended) Blow-off air rate adjustment needle Blow-off valve Suction valve Sensor unit VACUUM EXTERNAL VACUUM GENERATOR CONTROLLER ■ How Individual air supply port, silencer vent type works Vacuum port Air supply for blow-off air Ejector VACUUM ACCESSORIES ② Suction valve: ON (At vacuum suction) Vacuum suction Air supply for blow-off air Exhaust air ③ Blow-off valve: ON (At blow-off air supply)

Vacuum Generator Series VACUUM GENERATOR Vacuum Generator VN ■ Specification Fluid medium Operating pressure range Operating temp. range Operating humidity range Protective structure Vibration resistance / shock resistance Air 0 ~ 0.55MPa 5 ~ 50°C (No freezing) 35 ~ 85%RH (No dew condensation) IEC standard IP40 equiv. Less than 50m/s²／Less than 150m/s² ■ Ejector Characteristics Model code VNE04 VNH05 VNE05 VNH06 VNE06 ※ The values in the table are reference values only. Suction flow varies according to the vacuum system conditions; vacuum port dia. or tube length. Item Suction valve Blow-off valve...