Vacuum pad for preventing unfavorable suction mark on a work-piece selection of pad sizes, materials and holder types. Pad size3sizes.　Pad material3types.　Holder type11types. ■ Suitable for LCD glass, work-pieces in coating process and semiconductor facility. ■ lexible F resin pad leaves less suction mark on work-pieces. release work-pieces by blow-off air. replacement of a resin pad without a spanner or a hex. key. length of a spring holder is selectable. ・ Conventional long stroke holder (with cover) is integrated into VPC or VPD. Stroke6, 10, 15 and 20 mm ・ Conventional long stroke holder (without cover) is renewed as VPOC or VPOD. Stroke20, 30, 40 and50mm of selections in pad holder for "Copper alloy free" and against "low ozone concentration". -S3 spec.No copper based metal parts. HNBR or FKM i

Vacuum Pad Series Vacuum Pad Mark-free Series ■ Selection list Mark-free LCD glass, work-pieces in coating process and semiconductor facility. Recommended work-piece PEEK, POM, Conductive PEEK Holder size Holder type Fixed type Spring type Holder without cover is available. Direct mount (Fixed type or Spring type) ■ Specifications of Flexible Adapter Fluid medium Operating vacuum range Operating temp. range

Gasket ( ① SPCC+NBR for VP10Q □ , SUS304+NBR for VP20/30Q □ ) ( ② SUS316+FKM) Pad guide Special stainless steel ※ 2 + nitriding） （ Weight block Special stainless steel ※ 2 + nitriding） （ Metallic body ① Nickel-plated brass） （ （② Special stainless steel ※ 2） Plate ① Nickel-plated brass） （ （② Special stainless steel ※ 2） Pad PEEK / POM / Conductive PEEK） （ Spring（ SUS304） Spacer（ SUS304 + nitriding） Diaphragm（ FKM） ※1. ① : Standard type, ② : Copper alloy free (-S3) ※2. SUS303 Equivalent corrosivity ■ Model designation of Pad rubber only (Ex.) VP Code Size(mm) Connection config. code Code Type ⑤...

Vacuum Pad Series Vacuum Pad Mark-free Series ■ Model designation of Pad & screw set (Ex.) VP ⑨ -S3 spec. ⑥ Connection configuration code For ② , ④ and ⑤ , refer to "Model designation of Pad rubber only (Ex.)" on page 954. ⑥ .Connection configuration code Code Pad size (mm) -S3 Metal parts : Copper alloy free material Seal parts : FKM or HNBR ■ Vacuum pad dimensions Unit：mm Vacuum pad Model code ■ Flexible adapter dimensions M Flexible adapter Model code CFHM4-M59 CFHM6-M59 Applicable pad model code VP10Q5 VP20, 30Q5 ※ .9: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal...

■ Table of Connection configuration code, etc. for connection of pad and holder Pad dia. Model code of (mm) vacuum pad Connection Model code of Pad configuration code & screw set Connection type Table of complement parts model code Flexible adapter VP10Q-CFH VP20Q-CFH ■ Flexible adapter and Vacuum pad dimensions Unit：mm Model code VP10Q5-M49 VP20Q5-M69 VP30Q5-M69 Connection config. code ※ .5:Replaced with Pad resin material code. Refer to page 954 for details. ※ .9: Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing

Vacuum Pad Series Vacuum Pad Mark-free Series ■ Model designation of Holder + Pad (Ex.) VP -6J ⑨ -S3 spec. ⑧ Filter (Option) Vacuum Pad ① Holder type MB B − Fixed type / Side port Mini Standard No cover Type MD D OD Spring type / Side port MC C OC Spring type / Top port − Mini F Standard − No cover Type Spring type / Direct mount Mini Standard No cover Type Mini Standard No cover Type MA A − Fixed type / Top port Mini Standard No cover Type ⑦ Fall prevention valve (Option) ⑥ Port size and joint type ② .Pad size Code Size (mm) Effective dia. (mm) Connection config. code ③ .Stroke (No code entry...

④ .Pad type Code Type ⑤ .Pad material / Application Code Resin material Application K PEEK Semiconductor / liquid crystal production device Volume resistance Color M POM Various production line Food-related equipment Packaging machine ー White KE Conductive PEEK Semiconductor / liquid crystal production device Electric components 105~106Ω·cm Black ※.Volume resistance value is a representative value from a material manufacturer and is not a guaranteed value. ⑥ .Port size and joint type Connection config. code Joint type Code Size -M4 -M6 ※.Joint size differs depending on the holder type. Check...

Vacuum Pad Series Vacuum Pad Mark-free Series ■ Vacuum pad + Fixed type holder Dimensions VPMA Fixed type / Top port / Push-in fitting / Mini holder RoHS Compliant Copper alloy free available Connection config. code ※ .5:Replaced with Pad resin material code. Refer to page 958 for details. ※ .9:Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts). -S3 spec. is available for model codes with 9 in the table above. ※ .Tightening torque of a pad holder fixing bulkhead nut is as below. ▪Pad dia.：ø10mm and Thread size：M8×0.75 ▶ 2.5~3.5N·m....

Fixed type / Top port / Push-in fitting / Standard holder RoHS Compliant Copper alloy free available Unit：mm Model code Connection config. code ※ .5:Replaced with Pad resin material code. Refer to page 958 for details. ※ .9:Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts). -S3 spec. is available for model codes with 9 in the table above. ※ .Tightening torque of a pad holder fixing bulkhead nut is as below. ▪Pad dia.：ø10mm ▶ 12~14N·m. ▪Pad dia.：ø20~30mm ▶ 18~21N·m Fixed type / Top port / Barb fitting / Standard holder RoHS Compliant...

Vacuum Pad Series Vacuum Pad Mark-free Series VPA Fixed type / Top port / Female thread / Standard holder RoHS Compliant Copper alloy free available Connection config. code ※ .5:Replaced with Pad resin material code. Refer to page 958 for details. ※ .9:Replaced with "-S3" for -S3 spec. (Copper alloy free material for metal parts and FKM or HNBR for sealing parts). ※ .Tightening torque of a pad holder fixing bulkhead nut is 12~14N·m. VPMB Fixed type / Side port / Push-in fitting / Mini holder Copper alloy free available RoHS Compliant Unit：mm Connection config. code ※ .5:Replaced with Pad resin...