Spirit® High Power Femtosecond Lasers: The New Standard for High-Precision Micromachining The Spirit family sets new standards for femtosecond lasers in high-precision industrial manufacturing for micromachining of polymers, thin metals, sapphire, polycrystalline diamond, and many other materials. These lasers deliver high average power, high pulse energy, and high repetition rates for increased throughput. Customers benefit from the shortest industrially available pulse duration and superior beam quality that in turn enables machining complex and challenging parts with highest precision and quality with literally no heat affected zone (HAZ) at the highest throughput. Spirit lasers are designed for industrial use and offer reliable and robust 24/7 operation with lowest cost of ownership. The Spirit lasers also provide unprecedented performance for pumping of non-linear OPAs for 3-photon microscopy and spectroscopy applications. Highest-Precision Machining of the Finest Features with Highest Throughput Our new additions to the industry-proven Spirit platform offers impressive versatility and performance, enabling a variety of applications. High average power (>140 W) and high pulse energy (>600 µJ) combined with high repetition rates push femtosecond micromachining applications to highest levels of throughput at lowest cost-of-ownership. The user-configurable burst mode enables processing with increased ablation efficiency, and thus increased throughput and quality for certain materials. Pulse energy and repetition rate adjustability (single shot – 30 MHz) make the Spirit 1030-140 the ideal source for ablation and cutting. The integrated pulse picker offers full control of the laser output with single pulse selection and fast power control via an analog input signal. The Spirit Advantage • High average power up to >140 W at 1030 nm and >50 W at 515 nm • Same footprint for all Spirit models • Adjustable repetition rate from single shot up to 30 MHz for processing at highest throughput • <400 fs pulse duration for smallest heat affected zone (HAZ) • User-configurable burst mode for processing with highest ablation efficiency • Near diffraction-limited beam quality (typ. M2<1.1) for highest resolution and finest features • Integrated pulse-picker for advanced triggering • 24/7 industrial reliability • Lowest cost-of-ownership Applications • OLED display manufacturing • Semiconductor wafer dicing • Polymer cutting • Metal drilling and cutting • Precision machining of hard and brittle materials • Polycrystalline diamond (PCD) cutting and ablation • Sapphire cutting and drilling • 3-photon microscopy •

Spirit Spirit 515-50 offers an output power of >50 W and a typical pulse width of <300 fs at a wavelength of 515 nm. At this shorter wavelength, machining of the finest features is possible, depending on the material, at equal or even higher speeds compared to those obtained with other technologies. 24/7 Industrial Reliability The Spirit lasers are designed and tested to rigorous quality standards for reliable 24/7 operation. The built-in data logging and analysis capability allows monitoring of all relevant laser parameters over the life time of the system. As such, this represents an indispensable...

Output Characteristics Wavelength Output Power Pulse Energy Pulse Selection 1–30 MHz Single shot to 2 MHz using Integrated Pulse Picker (AOM) Pulse Width Power Stability Pulse-to-Pulse Stability Spatial Mode Beam Diameter Beam Divergence, full angle Burst Mode Pre-Pulse Contrast Ratio Cold Start Time Warm Start Time Environmental specifications Operating Temperature Relative Humidity Cooling Requirements Laser Head Water cooled Power Supply Water cooled Utility Requirements Voltage Laser Head Physical Characteristics Dimensions (L x W x H) Rack with Power Supply and Chiller Phys ical Characteristics...