Overview: The document describes the PS-7 Gas Detection System designed for semiconductor manufacturing plants. It highlights the system's compact design, ease of use, and advanced features for detecting gases like NF3.
Specifications:- Detection Principles: Controlled potential electrolysis, hot wire semiconductor, and galvanic cell sensors.
- Sampling Method: Pump suction type with automatic flow rate control.
- Power Source: 24V DC with a power consumption of approximately 7W.
- Operating Conditions: Temperature range of 0°C to 40°C and humidity range of 30-85% RH.
- Dimensions and Weight: W62×H124×D143mm, approximately 1.0kg.
Key Features:- Compact and Lightweight: The PS-7 is smaller and lighter than previous models, facilitating easy installation.
- LCD Status Display: Provides clear visibility of gas concentration, alarm status, and error messages.
- Sensor Unit Management: Prevents incorrect sensor insertion and allows easy replacement without tools.
- Data Acquisition: Compatible with PDA for data retrieval and DeviceNet for PLC connectivity.
- Standards Compliance: Meets CE and SEMI standards.
Alarms and Indicators:- Gas Alarm: Two-stage alarm with red LED and LCD indications.
- Flow Alarm: Yellow LED and LCD indications for low flow or clogging.
- Sensor Trouble Alarm: Yellow LED and LCD indications for sensor issues.
- Pyrolyzer Wire Break Alarm: Specific to models with a pyrolyzer, indicated by yellow LED and LCD.
Maintenance and Support:- Factory-calibrated sensor units ready for use upon delivery.
- Trade-in and recycling options for sensor units to reduce costs.
- Reliable management system for replacement periods and maintenance support.
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