Gas Detection System for Semiconductor Manufacturing Plants "Extractive"Gas Detector Model PS-7 A "Cosmos System" that reduces running costs. Compact and lightweight. The most advanced state-of-the-art PS-7 Gas Detector Head A "Cosmos System" Gas Detector made more compact and lightweight with easy-to-read LCD display Combine with Optional Units. NF3 and other gases can be detected by combining the Cosmos PS-7 Gas Detector Head with a pyrolyzer and electrochemical sensor. DeviceNet used for communications with host system, allowing easy connection to PLCs.

"Cosmos System” Gas Detector Head Approximately half the size and weight of previous model. An LCD gives easy-to-read displays of gas concentrations, the alarms, and error messages. Device status can be read at a glance. Sampling flowrate automatically held constant to provide stable detection. Sensor unit and Gas Flow Path * are made in modules that can be changed easily without tools. If a sensor unit for a different gas is loaded, an error alarm is issued and tells an abnormal operation. Note: Gas Flow Path includes all internal tubing and pump. Flow Sign The sign rotates, indicating that...

is an ideal system that does not require an on-site calibration of the sensor for preventing contamination of your clean room by calibration gases and that recycles the sensor and the parts for reducing the running cost. Features of the "PS-7" Gas Detector Sensor units and gas flow path can be replaced without tools. All functional parts are in modules for easy replacement. The Cosmos assists in reliable management of the timing for sensor unit and gas flow path replacement. Sensor units are already calibrated when delivered to site. Sensor units only need zero check and operation checks after...

Option DeviceNet Unit Cable inlet •Please read the instrucion manual before using to ensure correct operation. •Be sure to use only the power source and voltage indicated. The information contained in this catalog is subject to change. Head Office : 2-5-4, Mitsuya-naka, Yodogawa-ku, Osaka 532-0036,JAPAN TEL.(06)6309-1505 FAX.(06)6308-8129 Tokyo Office : 3rd floor, Towa-Hamamatsucho Bldg., 2-6-2 Hamamatsu-cho, Minato-ku, Tokyo 105-0013, JAPAN TEL.(03)5403-2702 FAX.(03)5403-2710 Shanghai Office: Room 803 Tomson Commercial Building No.710 Dong Fang Road, Pudong, Shanghai 200122 TEL.86-21-5830-0019...