solutions for your operations in gases and plasmas Product catalog

solutions for your operations in gases and plasmas neoplas control GmbH Walther-Rathenau-Str. 49 a / 17489 Greifswald / Germany Phone: +49 3834 515 400 / Fax: +49 3834 515 401 CEO Dr. Marko Häckel / [email protected] CEO Dipl.-Ing. Henrik Zimmermann / [email protected]

Overview - Applications, Technology & Company 4-5 Process Monitoring & Control 6 Q-MACS Process fibre 9 Active Thermal Probe 10 Trace Gas Emission and Analysing Monitoring 11 Q-MACS Trace compact 13 Tailored Systems for Research and Industry 14 Q-MACS Spectral Calibration Source 16 Q-MACS MidIR Point Source 18 Q-MACS Basic embedded 22 Q-MACS Detector board 29 Q-MACS Long path cell board 30 Q-MACS Multipass optic cell 31 Q-MACS Reference gas cell 32

High Precision Plasma and Gas Analysis – In-line, On-line in real-time Why spectroscopy in the mid infrared region? Environmental and safety requirements are becoming stricter. The demands on quality and efficiency of industrial production are rising not only for economical reasons in many industries. Scientific research is going into new dimensions of measurable parameters. Optical spectrometers can help to meet new regulatory demands, optimize processes and support basic research, where a high degree of reliability, security and readiness is required as well as high accuracy and reproducebility....

Until recently, the on-line control of plasma processes was not really feasible. The idea to design Q-MACS is based on the recent development and commercial availability of a new laser class, the Quantum Cascade Laser. This new option has made it possible to bring a system to the market that is compact and user friendly for measurement and control of industrial processes in particular for on-line process monitoring. The Q-MACS products need almost no maintenance and can be individually adapted to customer requirements inside industrial processes due to its modular design. The systems can be configurated...

Process Monitoring & Control The systems of the Q-MACS Process family are designed for in situ monitoring and to control industrial processes. Directly adapted to your production system Q-MACS will enable you to ensure an effective process control. Being dependent on the exact concentrations of different chemical species in plasma or gaseous states up to the range of parts per billion, Q-MACS has been developed to meet these highest precision standards. Furthermore, an in situ process control by a Q-MAC system makes it possible to observe production processes on the one hand and allows you an...

The Q-MACS Process is a portable monitoring system for on line measurements of industrial processes. It is based on the Q-MACS Basic and features a three channel setup to improve the signal-to-noise ratio and to achieve long-term stability. This open path system uses infrared absorption spectroscopy to measure absolute molecular concentrations. The optical coupling to the measurement's region can also be provided by an optical fibre. description three path infrared spectrometer with IR-light source sensitivity down to ppb range [1] time resolution down to milliseconds parts ■ optical board ■...

Q-MACS Process DC technical specification The Q-MACS Process DC is a portable monitoring system for on-line measurements of industrial processes, where the measurement equipment’s installation in the process room is not possible. This open path system uses mid-infrared absorption spectroscopic methods to determine absolute molecular concentrations. It is based on the Q-MACS Basic and features a dual channel setup, which allows the simultaneous measurement of multiple species. The long-term stability for broad absorption features was improved by adapting normalization concepts. general description...

Q-MACS Process fibre technical specification The Q-MACS Process fibre is a portable monitoring system for online measurements of industrial processes. It is bases on the Q-MACS Basic and features a two channel setup to achieve long-term stability and can be directly coupled to the measuring path via an IR-fibre. The system uses infrared absorption spectroscopy to measure absolute molecular concentrations. general description two path infrared spectrometer with IRlight source, IR-fibre coupling response time time resolution down to milliseconds, sub-microsecond time resolution on request components...

Active Thermal Probe technical specification The characterization, control and monitoring of plasma processes is crucial for the production of high quality coatings and material properties. A parameter of paramount importance is the actual and total energy influx to the substrate – the active thermal probe is the single tool to measure this decisive quantity. Incoming particles influence surface processes and reactions at the substrate. This energy along with other components like thermal radiation or chemical energy comprises the total energy influx. The active thermal probe measures continuously...

Q-MACS Trace systems allow a highly selective and sensitive gas analysis up to concentration rates of parts per trillion (ppt). They are in an adaptable steady or portable state and have been developed for trace gas measurements in scientific research, to monitor environmental or security regulations and to meet industrial demands for fast, reliable determination of gaseous species. A long path cell further increases the measuring accuracy. ■ trace gas measurement by using a long path cell ■ adaptable stationary or mobile system ■ detection and identification of molecules in concentrations up...

Q-MACS Trace technical specification The Q-MACS Trace is a portable system for high sensitive trace gas measurements using different optical long path cells which depend on the sensitivity required. It is based on the Q-MACS Basic and uses infrared absorption spectroscopy to measure absolute molecular concentrations. general description single path infrared spectrometer with IR-light source and long path cell time resolution system versions ▪▪ Q-MACS Trace 3.6 - 36 m Long Path Cell ▪▪ Q-MACS Trace 5.4 - 54 m Long Path Cell ▪▪ Q-MACS Trace 7.6 - 76 m Long Path Cell ▪▪ Q-MACS Trace 10.0 - 100 m...