High-precision and large-load Z-axis linear motor stage NFZ240-Z series (Z-axis high-precision linear motor stage) Vertical axis linear motor motion platform: with counterweight balance and guide rail brake Specification Motor type Dual linear motor drive Raster resolution sin\cos 4.88nm（Other higher resolutions are optional） Motor thrust Minimum step [nm] Travel [mm] 50nm(With nanopwm or linear driver) 100 25kg(Pneumatic constant force spring

Linear Motor Stages XYZ Axis LMT-XYZ (high precision linear motor stage) XYZ one-piece combination Specification Motor type Three-phase ironless motor Voice coil motor Default 100nm digital (optional 1vpp analog or other resolution) Motor thrust Minimum step size[nm] Repeatability [um] Position Accuracy [um] 5kg(Z axis with pneumatic constant force balance weight)

Linear Motor Stages XYZ Axis LMT-XYZ (high precision linear motor stage) XYZ Integrated combination Specification Motor Type Three-phase ironless motor Voice coil motor+ Default 100nm digital quantity Motor thrust Minimum step size[nm] Repeatability [um] Position Accuracy [um] 5kg(Z axis table load capacity)

● TR I s e r i e s p ar al l e l mo ti o n p l atfo r m TRI-R5 Three-axis parallel leveling platform Specification Z axes Repeat Positioning Accuracy Positional stability θ axes Repeat Positioning Accuracy Counterweight balance Pneumatic balance (minimum air pressure 0.1MPa maximum air pressure 0.6MPa)

Large trave l ho llo w line ar m o to r displace m e nt table LMTE390-XY-330X330 Large travel hollow linear motor stage Specifcation Motor type Dual linear motor drive Raster resolution sin\cos 4.88nm（Optional absolute value or higher resolution） Motor thrust Minimum step size [nm] Travel [mm] 50nm(Paired with nanopwm or linear driver) 330 Maximum acceleration [g] no load

Low Profile, High Precision Vertical Translation Stage Platform The E-ABVT-Z vertical voice motor stage platform provides high precision Z-axis motion with sub-micron resolution, for loads up to 6 kg. Unlike vertically mounted linear stages, the highstiffness platform concept allows for a much lower profile with 360-degree access to its payload while avoiding moment loads that can affect bearing performance and/or straightness of motion. Elevation Stage with Excellent Straightness and Flatness of Motion The vertical stage platform design provides excellent straightness and flatness, with better...

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