Precision air bearing stage ABW400 series,EC-ABL series,EABRX-M150,EABRX-M 200,E-ABT-XY-360X360
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ABT-XY-360X360 （Ceramic linear motor stage） XY Air bearing Linear Motor Stage Common material Ceramic material The ceramic version uses high-purity alumina as the airfloating structure and guide elements. Compared with granite and metal, alumina ceramics have a smaller expansion coefficient, and the advantages of Straightness, hardness, and wear resistance. Commomn material Ceramic material Motor type Three-phase iron core motor Opticval Encode resolution sin\cos 4.88nm(other higher resolutions are optional) X axes Motor thrust[N] Y axes Motor thrust[N] X axes No-load acceleration[g] Y axes...

ABL250-X One-dimensional Ultra-precision air bearing platform Specification Opticval Encode resolution [nm] Repeatability Accuracy [nm] 5nm Opticval Encode resolution 2um/100mm （After calibration can be less than0.3um/100mm）

● Air bearing stage ABW400-X One-dimensional air floating platform Specification Opticval Encode resolution [nm] Repeatability Accuracy [nm] 5nm Opticval Encode resolution 2um/100mm （After calibration can be less than0.3um/100mm）

Air Bearing rotation stage ABRX-M150 Direct drive air bearing rotary stage motor torque Maximum speed Encoder lines Encoder resolution 0.45sec (The digital quantity corresponds to 0.1um, and a higher resolution of 1Vpp is optional) Axial maximum load (5bar) Radial maximum load (5bar) Axial maximum rigidity (5bar) Radial maximum rigidity (5bar) axial runout* radial runout*

Air Bearing rotation stages ABRX-M200 Direct drive air bearing rotary stage motor torque Maximum speed Encoder lines Encoder resolution 0.41sec (The digital quantity corresponds to 0.1um, and a higher resolution of 1Vpp is optional) Axial maximum load (5bar) Radial maximum load (5bar) Axial maximum rigidity (5bar) Radial maximum rigidity (5bar) axial runout* radial runout*

• Proprietary manufacturing techniques result in a stage with unsurpassed pitch, roll and yaw characteristics. •Linear Motor Drive •The driving force behind this stage is Precision-stage brushless linear servomotor. The utilizes an ironless forcer, which means there is zero cogging and no attractive forces – resulting in unrivaled smoothness of motion. Since the stage is friction-free and the motor has zero cogging, extremely fine resolutions are achievable. Zero Maintenance The noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of...

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