Linear motor XY stage E-MST-XY 205X205,ELMT-MINIXY series,,E-U1LM200-XX Series,
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Linear motor XY stage E-MST-XY 205X205,ELMT-MINIXY series,,E-U1LM200-XX Series, - 1

NATSU PRECISION TRADE LIMITED

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Linear motor XY stage E-MST-XY 205X205,ELMT-MINIXY series,,E-U1LM200-XX Series, - 2

GLMT-XY High Precision Linear Motor Stage) XY Linear motor stage Motor type Three-phase iron core motor Opticval Encode resolution sin\cos 4.88nm(other higher resolutions are optional) X axes Motor thrust[N] Y axes Motor thrust[N] X axes No-load acceleration[g] Y axes No-load acceleration[g] 10nm (with nanopwm or linear driver)

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Linear motor XY stage E-MST-XY 205X205,ELMT-MINIXY series,,E-U1LM200-XX Series, - 3

• Linear Motor Stage LMT-XY (High precisionLinear Motor Stage) XY Linear motor motion Stage Motor type Three-phase ironless motor Opticval Encode resolution sin\cos 4.88nm(Other higher resolutions are optional) Motor thrust min step size[nm] Travel [mm] 10nm (with nanopwm or linear driver) 100x100 Max Speed [mm/s] Max load capacity [kg]

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Linear motor XY stage E-MST-XY 205X205,ELMT-MINIXY series,,E-U1LM200-XX Series, - 4

• U1LM Series Linear Motor Stages U1LM200-XX Series Linear Motor Stages Specification Optical Incoder resolution [nm] 100nm (standard digital quantity) optional other models Opticval Encode resolution or 1vpp analog quantity Positioning accuracy Uncalibrated ±4um/100mm (less than ±1.5um after calibration) Motor thrust Maximum acceleration Moving mass Load CapacityHorizonta[kg] Load Capaci

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Linear motor XY stage E-MST-XY 205X205,ELMT-MINIXY series,,E-U1LM200-XX Series, - 5

microscope scanning stage E-MST-XY-205x205 Industrial measurement microscope scanning stage Motor type and drive mode 2-phase stepper motor + precision ball screw Screw lead positioning accuracy minimum step size Orthogonality [arcsec] Structural material and surface treatment

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Linear motor XY stage E-MST-XY 205X205,ELMT-MINIXY series,,E-U1LM200-XX Series, - 6

Linear motor stage and controller ELMT-MINIXY ELMT-MINIXY series has extremely compact dimensions and excellent dynamic performance, especially suitable for those who are sensitive to space size, At the same time, it is hoped to have a larger stroke and higher precision application scenarios. ● One-piece structure processing, good rigidity and stability, high flatness ● Non-contact direct drive motor, ultrahigh precision and excellent dynamic performance ● Ironless motor, the speed fluctuation is less than one thousandth (combined with the specified type of drive, laboratory environment...

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Linear motor XY stage E-MST-XY 205X205,ELMT-MINIXY series,,E-U1LM200-XX Series, - 7

• Linear motors • •Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and • transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and • accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision • because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the • lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is...

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