MotorizedStages MM-4M-F Folded Motorized MicroMini Stages TM Specifications: *Repeatability: *Homing Repeatability: *Accuracy (linearity): Straightness: Speed (max.): †Slider Backlash: Gearhead Backlash: Encoder Conversion(resolution): ±0.5µm ±0.5µm ±1.0µm per 25mm of travel ±2.0µm maximum deviation per 50mm of travel 1.65mm/second @ 12 V with 64:1 gearhead 1µm <2.54µm; can be compensated in software without overshoot 0.49609µm per count, with 16:1 gearhead *Encoder resolution must be added, based on the gearhead: 16:1 add ±0.0005mm, 64:1 add ±0.00012mm †Slider backlash represents maximum overshoot Motor: Slide: Vacuum Compatibility: Load Capacity: Horizontal: Vertical: Side: 10mm diameter, 6-12 VDC servo, brush type Cross roller bearing 10-3 Torr, standard, 10-6 Torr available 3.0 kg 1.0 kg 1.5 kg Travel Ranges and Dimensions: Model No. MM-4M-F-25 Stage Body (L x W x H) 97 x 31.5 x 23 (mm) 3.82 x 1.24 x 0.905 (inch) The information contained in this data sheet is subject to change without notice. Critical dimensions or specifications should be verified with our technical support staff. National Aperture, Inc. - 16 Northwestern Dr. - Salem, N.H. 03079-4810

MM-4M-F Motor Stage 25mm & 50mm Travel Dimensional Data Tabulated Data for MM-4M-F Stages Travel 0.190-80 UNS-3A Leadscrew Drive Gears "C" Clearance for M2.5 SHCS Typ. 4 places Bottom View Side View The information contained in this data sheet is subject to change without notice. Critical dimensions or specifications should be verified with our technical support staff. National Aperture, Inc. - 16 Northwestern Dr. - Salem, N.H. 03079-4810