MotorizedStages MM-1M Standard Motorized MicroMini Stages TM Specifications: *Repeatability: *Homing Repeatability: *Accuracy (linearity): Speed (max.): Slider Backlash: Encoder Conversion (resolution): *Encoder resolution must be added based on the gearhead: 16:1 add ±0.5µm, 64:1 add ±0.12µm Wobble (max.): Runout (max.): Gearhead Backlash: Motor: Vacuum compatibility: 10 µrad (~2 arc-second) (No ball bearings) 0.002 mm ≤2.65 µm equivalent; can be compensated in software without overshoot 6 mm diameter, 4.5 VDC servo, brush type (MTR-6-50E-4.5v) TBD Load Capacity: *Direct top or side load: *Push: **Return Force ext-comp.: *Tilt: *Twist: *These stages may be run at twice the specified ratings without damage, but with a loss of accuracy and speed. **Retract is limited by the preload spring. Travel Ranges and Dimensions: Model No. Travel Range The information contained in this data sheet is subject to change without notice. Critical dimensions or specifications should be verified with our technical support staff. National Aperture, Inc. - 16 Northwestern Dr. - Salem, N.H. 03079-4810

THRU MOUNTING 0.1S6 inch (4.0mm} REAM THRU The information contained in this data sheet is subject to change without notice. Critical dimensions or specifications should be verified with our technical support staff. National Aperture, Inc. - 16 Northwestern Dr. - Salem, N.H. 03079^810 - Tel. (800) 360^598 - (603) 893-7393 - FAX (603) 893-7857 - www.nationalaperture.com/www.naimotion.com