Wafer and Thin Film Thickness Measurement
2Pages

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Catalog excerpts

Wafer and Thin Film Thickness Measurement - 1

A worldwide leader in precision measurement solutions 76-300 mm wafer diameters High-resolution LCD display Menu-driven for fast, easy setup 5-point, TTV and bow measurements Ethernet and RS232 computer interface Wafer Measurement Systems for Semiconducting and Semi-insulating Wafers Front USB interface for easy data storage Up to 1700µm measurement range Cost-effective alternative to fully-automated wafer inspection systems

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Wafer and Thin Film Thickness Measurement - 2

ProformaTM 300i - Manual Wafer Measurement Tool Using MTI's proprietary non-contact capacitance probes, the Proforma 300i is fast, accurate and reliable. The Proforma 300i is capable of measuring wafer up to 300mm in diameter for thickness, total thickness variation (TTV) and bow. Proprietary Push-PullTM probe technology Easy non-abrasive wafer positioning Pin guides provide centering of industry standard round wafer sizes Menu driven interface Bubble Level On-board microprocessor for accurate and repeatable measurements USB Port for storing data to flash drives Adjustable stage for precise...

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