*mydirectindustry

Catalogs
MTI Instruments
Wafer Metrology System

Wafer Metrology System

Product catalog summary

Overview: The document describes the Proforma 300i, a manual wafer measurement tool by MTI Instruments, designed for semiconducting and semi-insulating wafers. It offers a cost-effective alternative to fully automated systems, supporting wafer diameters from 76 to 300 mm.

Key Features:

High-resolution LCD display and menu-driven interface for easy setup.
Capable of 5-point, total thickness variation (TTV), and bow measurements.
Supports Ethernet, RS232, and USB interfaces for data storage and remote access.
Measurement range up to 1700µm with an accuracy of ±0.25 µm and resolution of 0.05 µm.
Operates at temperatures between 15 to 40ºC with a response time of 60ms.

Specifications:

Dimensions: 483x388x89 mm
Weight: 12.3 kg
Electrical Input: 100 to 240VAC, 50 to 60Hz, 50 Watts
Supported Materials: Silicon (Si), Germanium (Ge), Indium Phosphide (InP), Gallium Arsenide (GaAs)

Additional Features:

Non-contact capacitance probes for fast and reliable measurements.
Adjustable stage for precise leveling and easy non-abrasive wafer positioning.
Optional SEMI MF534-0707 Bow wafer ring for additional protection and bow measurement.

Contact Information: MTI Instruments, Inc., 325 Washington Avenue Extension, Albany, NY 12205-5505, USA. Phone: +1-518-218-2550, Toll-Free: 1-800-342-2203, Fax: +1-518-218-2506, Email: [email protected], Website: www.mtiinstruments.com

Catalog excerpts

A worldwide leader in precision measurement solutions 76-300 mm wafer diameters High-resolution LCD display Menu-driven for fast, easy setup 5-point, TTV and bow measurements Ethernet and RS232 computer interface Wafer Measurement Systems for Semiconducting and Semi-insulating Wafers Front USB interface for easy data storage Up to 1700µm measurement range Cost-effective alternative to fully-automated wafer inspection systems

Open the catalog to page 1

ProformaTM 300i - Manual Wafer Measurement Tool Using MTI's proprietary non-contact capacitance probes, the Proforma 300i is fast, accurate and reliable. The Proforma 300i is capable of measuring wafer up to 300mm in diameter for thickness, total thickness variation (TTV) and bow. Proprietary Push-PullTM probe technology Easy non-abrasive wafer positioning Pin guides provide centering of industry standard round wafer sizes Menu driven interface Bubble Level On-board microprocessor for accurate and repeatable measurements USB Port for storing data to flash drives Adjustable stage for precise leveling...

Open the catalog to page 2

All MTI Instruments catalogs and technical brochures

Archived catalogs

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

Brand list