A worldwide leader in precision measurement solutions S E M I - A U T O M A T E D W A F E R INSPECTION AND METROLOGY SYSTEM Wafer Measurement Systems for Semiconducting and Semi-insulating Wafers

THICKNES . ^Rp GLOBAL 2 ¥%OW ^^LATNESS The Proforma 300iSA is a desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials. The Proforma 300iSA delivers full wafer surface scanning for thickness, thickness variation, bow, warp, site and global flatness. User-defined and ASTM/SEMI compliant scan patterns are used to generate full 3-dimensional wafer images. The Proforma 300iSA Controller contains all the electronics and control hardware necessary to control the Measurement Stage. It is also the interface to the external computer. Unique Push/Pull Technology:...

Customized data reporting, multi-format data export and full network capability allows easy access to your process information from anywhere on your network. The quick and easy to use Windows® - based control system performs complex data analysis and provides output in tabular and 3-D graphical formats which can be exported to spreadsheet and word processing programs. The systems come preset for SEMI standard wafer diameters, with the ability to add custom wafer parameters if required. Each measurement and system parameter is selected from the user-friendly software interface. Parameters can...

Tw: Gtotal - (GAP© + GAP©) Total Thickness Variation (TTV): Tw/Max -Tw/Min MTI Instruments, Inc. 325 Washington Avenue Extension Albany, NY 12205-5505 PH: +1-518-218-2550 OR USA TOLL FREE: 1-800-342-2203 FAX: +1-518-218-2506 EMAIL: [email protected] www.mtiinstruments.com mti instruments A subsidiary of Mechanical Technology, Inc.(MKTY)