Proforma 300i

Proforma 300i

Proforma 300i

Product catalog summary
Overview: The document describes the Proforma 300i, a manual wafer measurement tool designed by MTI Instruments for semiconducting and semi-insulating wafers. It offers a cost-effective alternative to fully automated wafer inspection systems, supporting wafer diameters from 76 to 300 mm.
Key Features:
  • High-resolution LCD display and menu-driven interface for easy setup.
  • Capable of 5-point, total thickness variation (TTV), and bow measurements.
  • Supports Ethernet and RS232 computer interfaces, with a front USB interface for data storage.
  • Measurement range up to 1700µm with an accuracy of ±0.25 µm and a resolution of 0.05 µm.
  • Operational temperature range from 15 to 40ºC.
Specifications:
  • Dimensions: 483x388x89 mm.
  • Weight: 12.3 kg for the Proforma 300i model.
  • Electrical Input: 100 to 240VAC, 50 to 60Hz, 50 Watts.
  • Response Time: 60ms.
  • Supported Materials: Silicon (Si), Germanium (Ge), Indium Phosphide (InP), Gallium Arsenide (GaAs).
Additional Features:
  • Non-contact capacitance probes for fast and reliable measurements.
  • Adjustable stage for precise leveling and easy non-abrasive wafer positioning.
  • Optional SEMI MF534-0707 Bow wafer ring for additional wafer protection and bow measurement.
Contact Information: MTI Instruments, Inc., 325 Washington Avenue Extension, Albany, NY 12205-5505, USA. Phone: +1-518-218-2550, Toll-Free: 1-800-342-2203, Fax: +1-518-218-2506, Email: [email protected], Website: www.mtiinstruments.com
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Catalog excerpts

Proforma 300i-1

A worldwide leader in precision measurement solutions 76-300 mm wafer diameters High-resolution LCD display Menu-driven for fast, easy setup 5-point, TTV and bow measurements Ethernet and RS232 computer interface Wafer Measurement Systems for Semiconducting and Semi-insulating Wafers Front USB interface for easy data storage Up to 1700µm measurement range Cost-effective alternative to fully-automated wafer inspection systems

 Open the catalog to page 1
Proforma 300i-2

Using MTI's proprietary non-contact capacitance probes, the Proforma 300/ is fast, accurate and reliable. The Proforma 300/ is capable of measuring wafer up to 300mm in diameter for thickness, total thickness variation (TTV) and bow. Bubble Level Proprietary Push-Pull™ probe technology Pin guides provide centering of industry standard round wafer sizes — Menu driven interface Adjustable stage for precise leveling I T he OEM model consists of the acquisition system and probes only. As such, several parameters will be dependant on the custom installation parameters. Contact MTII nstruments to discuss...

 Open the catalog to page 2

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.