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ACCUMEASURE CAPACITANCE PROBES - PUSH-PULL

ACCUMEASURE CAPACITANCE PROBES - PUSH-PULL

ACCUMEASURE CAPACITANCE PROBES - PUSH-PULL

Product catalog summary
Overview: The document provides detailed information about capacitance sensors designed for ungrounded or poorly grounded targets. These sensors are particularly useful in applications such as measuring semiconductor thickness, sheet metal thickness, photovoltaic wafer thickness, automotive brake rotor run-out, and leveling or flatness measurements.
Key Features:
  • Push/Pull Probes: The sensors incorporate two high-precision probes within a single body, known as push and pull sensors, to enhance measurement accuracy.
  • Capacitance Technology: Traditional capacitive sensors require the target to be electrically grounded. The push-pull design eliminates inaccuracies caused by poorly grounded targets by allowing current to travel across the target surface.
  • Noise Cancellation: The push/pull amplifier design cancels common mode electrical noise, which is beneficial in environments with magnetic bearing surfaces, semiconductor wafers, and air bearing floating surfaces.
Technical Specifications:
  • Probe Types: The document lists various probe types, including D-Shape and Round-Shape probes, with specific dimensions and connector types.
  • Resolution and Linearity: Detailed specifications are provided for each probe model, including resolution at 500 Hz, linearity, and spot size.
  • Range and Sensitivity: Each probe model is described with its range, sensitivity, and minimum range extension capabilities.
Accessories and Calibration:
  • Optional Accessories: Includes low noise extension cables, BNC couplers, and fixture stands for calibration and fixturing.
  • Calibration Tools: The KD-CH-IIID calibrator is highlighted as a precision fixture for securing non-contact displacement sensors and varying target positions for calibration purposes.
Contact Information: MTI Instruments, Inc. provides contact details for further inquiries, including phone numbers, fax, email, and website.
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Catalog excerpts

ACCUMEASURE CAPACITANCE PROBES - PUSH-PULL-1

A worldwide leader in precision measurement solutions Capacitance Sensors for Ungrounded Targets or Poorly Grounded Targets PUSH/PULL PROBES TWO HIGH PRECISION SENSORS BUILT INTO ONE BODY

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ACCUMEASURE CAPACITANCE PROBES - PUSH-PULL-2

Capacitance Technology: Standard capacitive sensors require the target to be electrically grounded. Current flows from the probe face to the target and back to the amplifier to complete the circuit. The capacitance between probe and target is proportional to the distance and converted to a 0 - 10V output from the amplifier. The measurement of electrically grounded targets can be, however, affected by changes in the electrical conductivity or ground path of the target. Standard Capacitance Sensor Ground Shell Guard Sensing Area TARGET GROUND Ground Return Unique Push/Pull Technology: Two Probes...

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ACCUMEASURE CAPACITANCE PROBES - PUSH-PULL-3

11.58 mm (0.456 inch) 20 mm (0.787 inch) 100 mm (3.937 inch) Spot Size 11.58 mm (0.456 inch) 16 mm (0.63 inch) 100 mm (3.937 inch) Spot Size Range Extension Range Extension 9.45 mm (0.372 inch) 14.8 mm (0.583 inch) 34.04 mm (1.34 inch) Spot Size 7.11 mm (0.28 inch) 16 mm (0.63 inch) 50 mm (1.969 inch) Spot Size Range Extension Probe Connector Types: (Ground shell must be grounded to amplifier for proper performance) ILA Integrated Lead Axial ILR Integrated Lead Radial

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ACCUMEASURE CAPACITANCE PROBES - PUSH-PULL-4

E 7.42 mm (0.292 inch) D 10.26 mm (0.404 inch) L 31.75 mm (1.25 inch) Spot Size Range Extension E 10.26 mm (0.404 inch) D 13.97 mm (0.55 inch) L 31.75 mm (1.25 inch) Spot Size Range Extension E 12.83 mm (0.505 inch) D 19.05 mm (0.75 inch) L 31.75 mm (1.25 inch) Spot Size Range Extension E 16.15 mm (0.636 inch) D 22.96 mm (0.904 inch) L 31.75 mm (1.25 inch) Spot Size Probe Connector: (Ground shell must be grounded to amplifier for proper performance) ILA Integrated Lead Axial

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ACCUMEASURE CAPACITANCE PROBES - PUSH-PULL-5

Push/Pull Probe Specifications Reference Range Spot Size Standard Push/Pull probes are operated at 5X range extension with AccumeasureTM 500 capacitance modular rack systems and AS-562 OEM Boards. Compatible with the following MTI Capacitance Amplifiers Analog Output Benchtop Capacitance Modular System Analog Output Capacitance OEM Board The FS-2 is an adjustable fixture to support and position probes over the target being measured. The system consists of a probe clamp, 2 positioning arms, magnetic base, c-clamp base and a micrometer with a 7mm (0.28") travel. The probe clamp holds probes up...

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