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Surface Mount IGS gas Filter W-Seal

Surface Mount IGS gas Filter W-Seal
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IGS Surface Mount Filters W-Seal Configuration High-precision, high-flow, all-metal filtration engineered specifically for Integrated Gas System (IGS) assemblies Mott High Purity – who for years has provided the highest quality porous metal filters and flow restrictors for semiconductor manufacturing – also offers these same products in IGS-compatible designs. So now you can combine the ease of installation, stick component accessibility, ease of maintenance, reduced assembly time and compatibility between components that are typical of IGS, with the selection and performance benefits offered exclusively by Mott. Mott’s mission is to provide customers with unique filtration and flow control solutions using materials specifically designed for demanding operating conditions, 9 LRV efficiency and exacting flow control. Our full line of IGS filters and flow restrictor products is designed for compatibility with the gas system interfaces currently being specified on process tools, gas cabinets, and valve manifold box installations. As the challenges of the 300mm conversion have emerged, our technology has provided the necessary solutions. Features All-Metal Capabilities Withstands high temperatures and pressures No mechanical seals Easy retrofit Reliable 9 LRV filtration down to 0.003µm Many configuration options Consumes less space than standard In-line designs Wide range of materials, configurations and flow rates Ease of installation, reduced part variations and inventories All-Welded Construction Standard Footprint Mott Porous Media Standard IGS Interface Compact IGS Design Design Flexibility Modular IGS Design High flow rates – Mott porous metal media has unique properties that allow for the production of a wider range of flow, material and configuration options than our competitors. This flexibility in geometry provides filters with flow ratings of up to 100 slpm while meeting the envelope requirements of the industry. Wide choice of materials – Mott IGS filters are constructed of 316L SS, Hastelloy® C-22 or PENTA® Nickel, the most comprehensive offering in the industry. This translates to chemical compatibility with virtually any gas used in semiconductor production today, without elastomers or other non-metallic materials which could flex or shed particles. Complete range of product configurations – Mott’s standard IGS modular mount offerings include the 1.125" configuration with C-Seal or W-Seal, as well as the 1.5" version with C-Seal or W-Seal. We have the design you need. 1.125" Filter Design Flow passages equivalent to 1/4" tubing. Standard flow rates up to 50 slpm. Compatible with most popular compact modular substrate systems. 1.5" Filter Design Flow passages equivalent to 1/4" and 3/8" tubing. Standard flow rates up to 100 slpm (higher flows up to 200 slmp – consult factory). Compatible with most popular compact modular substrate systems. Hastelloy is a registered trademark of Haynes Int

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Typical Flow Curves for Mott 1.125" and 1.5" IGS Filters. The distinct advantages of using Mott products Typical Differential Pressure vs. Flow 0.83 Differential Pressure (PSID) Differential Pressure (PSID) W-Seal PENTA® Nickel Percent of Rated Flow Percent of Rated Flow 10 Liter Filter @ 30 psig 20 Liter Filter @ 30 psig 75 Liter Filter @ 90 psig 50 Liter Filter @ 90 psig 10 Liter Filter @ 90 psig 20 Liter Filter @ 90 psig 75 Liter Filter @ 30 psig 50 Liter Filter @ 30 psig Part Description for Standard Configurations 1.125" Filters Computer Part Number (CPN*) Maximum Rated Flow (slpm)...

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