Mott Static Flow Controller Description The Static Flow Controller (SFC) is a high accuracy flow setting device for gas applications. Completely customized to your conditions, the SFC sets a repeatable flow rate from 1 sccm to 40 slpm* based upon your gas type and pressure. Flow rate accuracy within 1% is achieved through proprietary porous metal technology and NIST traceable primary standard equipment. Ordering Information High accuracy, low cost 1. Desired flow rate (in sccm or slpm) +/- 1% Flow accuracy at the set point flow conditions Each SFC individually calibrated to your conditions +/- 0.1% repeatability Significant cost advantage over standard flow controller technology No need for expensive re-calibrations 4. Downstream pressure (in psi) 5. Specify hardware configuration (custom optional) 6. Specify operating gas temperature (°C or °F) Benefits Reliable and robust design Tamper-proof flow rate set to your conditions Long-life, anti-clog technology Compact design saves critical space Flow correction factors provided for varying temperatures and pressures conditions Manufactured in ISO class 5 cleanroom Need Point-of-use Filtration? See our High Purity filter options available at http://www.mottcorp.com *Ultra low flow and high flow rates available, contact a Mott sales representative for more i

Flow Ranges Available Operating Conditions Available Positive high pressure ► Contact a Mott sales representative with desired conditions Max Inlet Pressure / Max Differential Pressure +/- 0.2 seem of reading (< 10 seem) Operating Temperature Warm-up Time Wetted Materials Surface Finish Leak Integrity (External) 1 x 10 9 atm cc/sec Helium Leak Rating Fittings (compatible with)* *other fittings available on request 1/4" Face Seal / IGS 1.125" C-Seal Effect on Flow Rate Variation Temperature Variation, % Inlet Pressure Variation, % mott corporation 84 Spring Lane, Farmington, CT 06032-3159 | 860-747-6333...